Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

Jari Likonen; Mikko Hautala; Ilkka Koponen

doi:10.1016/0168-583X(94)95587-5

Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

Jari Likonen
, Mikko Hautala
, Ilkka Koponen

University of Helsinki

Research output: Contribution to journal › Article › Scientific › peer-review

3 Citations (Scopus)

Abstract

Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 10¹⁵ ions cm⁻²at room temperature. The mixed profiles were measured using a SIMS apparatus with O₂⁺ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å⁵/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.

Original language	English
Pages (from-to)	429-432
Number of pages	4
Journal	Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms
Volume	90
Issue number	1-4
DOIs	https://doi.org/10.1016/0168-583X(94)95587-5
Publication status	Published - 1994
MoE publication type	A1 Journal article-refereed

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Cite this

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title = "Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions",

abstract = "Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 {\AA} with increasing dose. The width of the Au marker increased from 80 to 90 {\AA}, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 {\AA}5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.",

author = "Jari Likonen and Mikko Hautala and Ilkka Koponen",

note = "Project code: ket 41383",

year = "1994",

doi = "10.1016/0168-583X(94)95587-5",

language = "English",

volume = "90",

pages = "429--432",

journal = "Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

AU - Likonen, Jari

AU - Hautala, Mikko

AU - Koponen, Ilkka

N1 - Project code: ket 41383

PY - 1994

Y1 - 1994

N2 - Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.

AB - Mixing of a thin Au layer in Pt and in reversed conditions mixing of a thin Pt layer in Au due to bombardment with 7 MeV Ag ions has been measured. The Pt-Au multilayers deposited on a Si substrate were irradiated to doses of 1–6 × 1015 ions cm−2 at room temperature. The mixed profiles were measured using a SIMS apparatus with O2+ sputter ions at energy 2.5 keV. The width of the Pt marker increased from 90 to 260 Å with increasing dose. The width of the Au marker increased from 80 to 90 Å, respectively. The corresponding mixing efficiencies are 5 ± 3 (Au marker) and 90 ± 30 Å5/eV (Pt marker). The experimental results are compared with simulations based on a model which describes the atomic transport from the initial collisional phase to the late thermalized stage. The calculated values for mixing efficiencies agree reasonably well with experimental values.

U2 - 10.1016/0168-583X(94)95587-5

DO - 10.1016/0168-583X(94)95587-5

M3 - Article

SN - 0168-583X

VL - 90

SP - 429

EP - 432

JO - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research. Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Ion beam mixing of Au marker in Pt and Pt marker by 7 MeV Ag ions

Abstract

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