Ion exchange processes for fabrication of integrated optical waveguide structures into glass substrates

Dissertation

Seppo Honkanen

Research output: ThesisDissertationCollection of Articles

Abstract

Ion exchange processes for fabrication of optical waveguide structures into glass substrates were studied.The fabrication of multimode waveguides by an Ag~--Na~ exchange with Ag thin film ion sources was analyzed in detail both theoretically and experimentally.The analysis increased considerably the understanding and the controllability of the process.The process was applied to the fabrication of several multimode components.Using Ag thin film ion sources channel waveguides were fabricated also directly into the integrated circuit lithography mask plates, which were patterned with high accuracy by the mask manufacturer.The method is especially promising for single mode applications, where the accuracy of the patterning is of great importance.For single mode applications an ionic masking method, which utilizes molten salt ion sources, was also studied.The method was applied to the fabrication of narrow channel waveguides and to the control of birefringence in waveguides.
Original languageEnglish
QualificationDoctor Degree
Awarding Institution
  • Helsinki University of Technology
Award date11 Mar 1988
Place of PublicationEspoo
Publisher
Print ISBNs951-38-3085-3
Publication statusPublished - 1988
MoE publication typeG5 Doctoral dissertation (article)

Fingerprint

optical waveguides
ion sources
waveguides
fabrication
glass
ions
masks
molten salts
controllability
thin films
masking
integrated circuits
birefringence
lithography

Keywords

  • ion exchange
  • optical waveguides
  • integrated optics

Cite this

Honkanen, Seppo. / Ion exchange processes for fabrication of integrated optical waveguide structures into glass substrates : Dissertation. Espoo : VTT Technical Research Centre of Finland, 1988. 73 p.
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abstract = "Ion exchange processes for fabrication of optical waveguide structures into glass substrates were studied.The fabrication of multimode waveguides by an Ag~--Na~ exchange with Ag thin film ion sources was analyzed in detail both theoretically and experimentally.The analysis increased considerably the understanding and the controllability of the process.The process was applied to the fabrication of several multimode components.Using Ag thin film ion sources channel waveguides were fabricated also directly into the integrated circuit lithography mask plates, which were patterned with high accuracy by the mask manufacturer.The method is especially promising for single mode applications, where the accuracy of the patterning is of great importance.For single mode applications an ionic masking method, which utilizes molten salt ion sources, was also studied.The method was applied to the fabrication of narrow channel waveguides and to the control of birefringence in waveguides.",
keywords = "ion exchange, optical waveguides, integrated optics",
author = "Seppo Honkanen",
year = "1988",
language = "English",
isbn = "951-38-3085-3",
series = "Publications / Technical Research Centre of Finland",
publisher = "VTT Technical Research Centre of Finland",
number = "46",
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Honkanen, S 1988, 'Ion exchange processes for fabrication of integrated optical waveguide structures into glass substrates: Dissertation', Doctor Degree, Helsinki University of Technology, Espoo.

Ion exchange processes for fabrication of integrated optical waveguide structures into glass substrates : Dissertation. / Honkanen, Seppo.

Espoo : VTT Technical Research Centre of Finland, 1988. 73 p.

Research output: ThesisDissertationCollection of Articles

TY - THES

T1 - Ion exchange processes for fabrication of integrated optical waveguide structures into glass substrates

T2 - Dissertation

AU - Honkanen, Seppo

PY - 1988

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N2 - Ion exchange processes for fabrication of optical waveguide structures into glass substrates were studied.The fabrication of multimode waveguides by an Ag~--Na~ exchange with Ag thin film ion sources was analyzed in detail both theoretically and experimentally.The analysis increased considerably the understanding and the controllability of the process.The process was applied to the fabrication of several multimode components.Using Ag thin film ion sources channel waveguides were fabricated also directly into the integrated circuit lithography mask plates, which were patterned with high accuracy by the mask manufacturer.The method is especially promising for single mode applications, where the accuracy of the patterning is of great importance.For single mode applications an ionic masking method, which utilizes molten salt ion sources, was also studied.The method was applied to the fabrication of narrow channel waveguides and to the control of birefringence in waveguides.

AB - Ion exchange processes for fabrication of optical waveguide structures into glass substrates were studied.The fabrication of multimode waveguides by an Ag~--Na~ exchange with Ag thin film ion sources was analyzed in detail both theoretically and experimentally.The analysis increased considerably the understanding and the controllability of the process.The process was applied to the fabrication of several multimode components.Using Ag thin film ion sources channel waveguides were fabricated also directly into the integrated circuit lithography mask plates, which were patterned with high accuracy by the mask manufacturer.The method is especially promising for single mode applications, where the accuracy of the patterning is of great importance.For single mode applications an ionic masking method, which utilizes molten salt ion sources, was also studied.The method was applied to the fabrication of narrow channel waveguides and to the control of birefringence in waveguides.

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KW - optical waveguides

KW - integrated optics

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SN - 951-38-3085-3

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