Ion-implanted silicon detectors processed on a 100 mm wafer

Iiro Hietanen, Jukka Lindgren, Risto Orava, Tuure Tuuva, Richard Brenner, Mikael Andersson, Kari Leinonen, Hannu Ronkainen

Research output: Contribution to journalArticle in a proceedings journalScientificpeer-review

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)116-120
JournalNuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume301
Issue number1
DOIs
Publication statusPublished - 1991
MoE publication typeA4 Article in a conference publication

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