Original language | English |
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Pages (from-to) | 116-120 |
Journal | Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment |
Volume | 301 |
Issue number | 1 |
DOIs | |
Publication status | Published - 1991 |
MoE publication type | A4 Article in a conference publication |
Ion-implanted silicon detectors processed on a 100 mm wafer
Iiro Hietanen, Jukka Lindgren, Risto Orava, Tuure Tuuva, Richard Brenner, Mikael Andersson, Kari Leinonen, Hannu Ronkainen
Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review
11
Citations
(Scopus)