Ion-implanted silicon detectors processed on a 100 mm wafer

Iiro Hietanen; Jukka Lindgren; Risto Orava; Tuure Tuuva; Richard Brenner; Mikael Andersson; Kari Leinonen; Hannu Ronkainen

doi:10.1016/0168-9002(91)90744-B

Ion-implanted silicon detectors processed on a 100 mm wafer

Iiro Hietanen
, Jukka Lindgren
, Risto Orava
, Tuure Tuuva
, Richard Brenner
, Mikael Andersson
, Kari Leinonen
, Hannu Ronkainen

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

Original language	English
Pages (from-to)	116-120
Journal	Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Volume	301
Issue number	1
DOIs	https://doi.org/10.1016/0168-9002(91)90744-B
Publication status	Published - 1991
MoE publication type	A4 Article in a conference publication

Access to Document

10.1016/0168-9002(91)90744-B

Cite this

@article{d7f70c747955467ba1b12077a4c46e13,

title = "Ion-implanted silicon detectors processed on a 100 mm wafer",

author = "Iiro Hietanen and Jukka Lindgren and Risto Orava and Tuure Tuuva and Richard Brenner and Mikael Andersson and Kari Leinonen and Hannu Ronkainen",

note = "Project code: PUO9026",

year = "1991",

doi = "10.1016/0168-9002(91)90744-B",

language = "English",

volume = "301",

pages = "116--120",

journal = "Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment",

issn = "0168-9002",

publisher = "Elsevier",

number = "1",

}

Hietanen, I, Lindgren, J, Orava, R, Tuuva, T, Brenner, R, Andersson, M, Leinonen, K & Ronkainen, H 1991, 'Ion-implanted silicon detectors processed on a 100 mm wafer', Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, vol. 301, no. 1, pp. 116-120. https://doi.org/10.1016/0168-9002(91)90744-B

Ion-implanted silicon detectors processed on a 100 mm wafer. / Hietanen, Iiro; Lindgren, Jukka; Orava, Risto et al.
In: Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, Vol. 301, No. 1, 1991, p. 116-120.

Research output: Contribution to journal › Article in a proceedings journal › Scientific › peer-review

TY - JOUR

T1 - Ion-implanted silicon detectors processed on a 100 mm wafer

AU - Hietanen, Iiro

AU - Lindgren, Jukka

AU - Orava, Risto

AU - Tuuva, Tuure

AU - Brenner, Richard

AU - Andersson, Mikael

AU - Leinonen, Kari

AU - Ronkainen, Hannu

N1 - Project code: PUO9026

PY - 1991

Y1 - 1991

U2 - 10.1016/0168-9002(91)90744-B

DO - 10.1016/0168-9002(91)90744-B

M3 - Article in a proceedings journal

SN - 0168-9002

VL - 301

SP - 116

EP - 120

JO - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

JF - Nuclear Instruments and Methods in Physics Research. Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

IS - 1

ER -