Keyphrases
Atomic Layer Deposition
100%
Growth Form
100%
Phenomenological Models
100%
Island Growth
100%
Growth per Cycle
40%
Reaction Cycle
13%
Surface Fraction
13%
Surface Roughness
6%
Material Layer
6%
Random Deposition
6%
Trimethylaluminum
6%
Steady Growth
6%
General Characteristics
6%
Enhanced Growth
6%
Growth Model
6%
Curved Surface
6%
Nanometer Range
6%
Physicochemical Processes
6%
Growth Substrate
6%
Conical Shape
6%
ZrCl4
6%
Linear Growth
6%
Hydrogen-terminated Silicon
6%
Value Characteristics
6%
INIS
layers
100%
growth
100%
deposition
100%
islands
100%
substrates
23%
surfaces
14%
curves
14%
water
9%
defects
9%
values
4%
simulation
4%
thickness
4%
silicon
4%
roughness
4%
size
4%
shape
4%
hydrogen
4%
range
4%
films
4%
randomness
4%
fabrication
4%
origin
4%
zirconium carbonates
4%
Engineering
Growth Mode
100%
Phenomenological Model
100%
Atomic Layer Deposition
100%
Deposition Process
13%
Reactant
6%
Material Layer
6%
Deposited Material
6%
Constant Value
6%
Limitations
6%
Nanometer Range
6%
Material Science
Surface (Surface Science)
100%
Surface Roughness
50%
Zirconium
50%
Film
50%
Silicon
50%
Chemical Engineering
Atomic Layer Deposition
100%
Film
6%
Earth and Planetary Sciences
Atomic Layer Epitaxy
100%
Surface Roughness
6%
Agricultural and Biological Sciences