Large 256-pixel X-ray transition-edge sensor arrays with Mo/TiW/Cu trilayers

M.R.J. Palosaari, Leif Grönberg, K.M. Kinnunen, D. Gunnarsson, Mika Prunnila, I.J. Maasilta

    Research output: Contribution to journalArticleScientificpeer-review

    3 Citations (Scopus)


    We describe the fabrication and electrical characterization of 256-pixel X-ray transition-edge sensor (TES) arrays intended for materials analysis applications. The processing is done on 6-in wafers, providing capabilities on a commercial scale. TES films were novel proximity coupled Mo/TiW/Cu trilayers, where the thin TiW layer in between aims to improve the stability of the devices by preventing unwanted effects such as Mo/Cu interdiffusion. The absorber elements were electrodeposited gold of thickness 2 μm. The single-pixel design discussed here is the so-called Corbino geometry. Most design goals were successfully met, such as the critical temperature, thermal time constant, and transition steepness.
    Original languageEnglish
    Article number2100304
    JournalIEEE Transactions on Applied Superconductivity
    Issue number3
    Publication statusPublished - 2015
    MoE publication typeA1 Journal article-refereed


    • nanosensors
    • superconducting devices
    • X-ray spectroscopy
    • large format arrays
    • critical temperatures
    • materials analysis


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