Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers

Anna Rissanen, Andreas Langner, Kai Viherkanto, Rami Mannila

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

8 Citations (Scopus)

Abstract

VTT’s optical MEMS Fabry-Perot interferometers (FPIs) are tunable optical filters, which enable miniaturization of spectral imagers into small, mass producible hand-held sensors with versatile optical measurement capabilities. FPI technology has also created a basis for various hyperspectral imaging instruments, ranging from nanosatellites, environmental sensing and precision agriculture with UAVs to instruments for skin cancer detection. Until now, these application demonstrations have been mostly realized with piezo-actuated FPIs fabricated by non-monolithical assembly method, suitable for achieving very large optical apertures and with capacity to small-to-medium volumes; however large-volume production of MEMS manufacturing supports the potential for emerging spectral imaging applications also in large-volume applications, such as in consumer/mobile products. Previously reported optical apertures of MEMS FPIs in the visible range have been up to 2 mm in size; this paper presents the design, successful fabrication and characterization of MEMS FPIs for central wavelengths of λ = 500 nm and λ = 650 nm with optical apertures up to 4 mm in diameter. The mirror membranes of the FPI structures consist of ALD (atomic layer deposited) TiO2-Al2O3 λ/4- thin film Bragg reflectors, with the air gap formed by sacrificial polymer etching in O2 plasma. The entire fabrication process is conducted below 150 °C, which makes it possible to monolithically integrate the filter structures on other ICdevices such as detectors. The realized MEMS devices are aimed for nanosatellite space application as breadboard hyperspectral imager demonstrators.
Original languageEnglish
Title of host publicationMOEMS and Miniaturized Systems XIV
PublisherInternational Society for Optics and Photonics SPIE
DOIs
Publication statusPublished - 27 Feb 2015
MoE publication typeA4 Article in a conference publication
EventMOEMS and Miniaturized Systems XIV - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

SeriesProceedings of SPIE
Volume9375
ISSN0277-786X

Conference

ConferenceMOEMS and Miniaturized Systems XIV
CountryUnited States
CitySan Francisco
Period9/02/1512/02/15

Fingerprint

microoptoelectromechanical systems
Fabry-Perot interferometers
apertures
microelectromechanical systems
nanosatellites
fabrication
agriculture
optical filters
miniaturization
Bragg reflectors
optical measurement
emerging
manufacturing
assembly
cancer
etching
mirrors
membranes
filters
sensors

Keywords

  • hyperspectral sensors
  • Fabry-Perot Interferometer
  • MEMS
  • imaging spectrometer

Cite this

Rissanen, A., Langner, A., Viherkanto, K., & Mannila, R. (2015). Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers. In MOEMS and Miniaturized Systems XIV [93750J] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9375 https://doi.org/10.1117/12.2075308
Rissanen, Anna ; Langner, Andreas ; Viherkanto, Kai ; Mannila, Rami. / Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers. MOEMS and Miniaturized Systems XIV. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9375).
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abstract = "VTT’s optical MEMS Fabry-Perot interferometers (FPIs) are tunable optical filters, which enable miniaturization of spectral imagers into small, mass producible hand-held sensors with versatile optical measurement capabilities. FPI technology has also created a basis for various hyperspectral imaging instruments, ranging from nanosatellites, environmental sensing and precision agriculture with UAVs to instruments for skin cancer detection. Until now, these application demonstrations have been mostly realized with piezo-actuated FPIs fabricated by non-monolithical assembly method, suitable for achieving very large optical apertures and with capacity to small-to-medium volumes; however large-volume production of MEMS manufacturing supports the potential for emerging spectral imaging applications also in large-volume applications, such as in consumer/mobile products. Previously reported optical apertures of MEMS FPIs in the visible range have been up to 2 mm in size; this paper presents the design, successful fabrication and characterization of MEMS FPIs for central wavelengths of λ = 500 nm and λ = 650 nm with optical apertures up to 4 mm in diameter. The mirror membranes of the FPI structures consist of ALD (atomic layer deposited) TiO2-Al2O3 λ/4- thin film Bragg reflectors, with the air gap formed by sacrificial polymer etching in O2 plasma. The entire fabrication process is conducted below 150 °C, which makes it possible to monolithically integrate the filter structures on other ICdevices such as detectors. The realized MEMS devices are aimed for nanosatellite space application as breadboard hyperspectral imager demonstrators.",
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Rissanen, A, Langner, A, Viherkanto, K & Mannila, R 2015, Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers. in MOEMS and Miniaturized Systems XIV., 93750J, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9375, MOEMS and Miniaturized Systems XIV, San Francisco, United States, 9/02/15. https://doi.org/10.1117/12.2075308

Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers. / Rissanen, Anna; Langner, Andreas; Viherkanto, Kai; Mannila, Rami.

MOEMS and Miniaturized Systems XIV. International Society for Optics and Photonics SPIE, 2015. 93750J (Proceedings of SPIE, Vol. 9375).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Rissanen A, Langner A, Viherkanto K, Mannila R. Large-aperture MOEMS Fabry-Perot interferometer for miniaturized spectral imagers. In MOEMS and Miniaturized Systems XIV. International Society for Optics and Photonics SPIE. 2015. 93750J. (Proceedings of SPIE, Vol. 9375). https://doi.org/10.1117/12.2075308