Large-area pressure-enduring entrance Windows for soft X-ray regime

Risto Mutikainen, Seppo Nenonen

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)


A technology capable of producing large-area pressure-tolerant x-ray entrance windows of submicrometer thickness is presented. It is based on successive tungsten griddings to support a multilayered membrane consisting of polyimide, aluminum, and aluminum nitride. The aspects of design and fabrication processes are discussed with emphasis on the window foil fabrication. The performance of the windows is presented in terms of x-ray transmission, gas leak, pressure endurance, and radiation hardness properties.
Original languageEnglish
Pages (from-to)82-95
JournalJournal of X-Ray Science and Technology
Issue number2
Publication statusPublished - 1994
MoE publication typeA1 Journal article-refereed


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