Large-area synthesis of high electrical performance MoS₂ by a commercially scalable atomic layer deposition process

Nikolaos Aspiotis
, Katrina Morgan
, Benjamin März
, Knut Müller-Caspary
, Martin Ebert
, Ed Weatherby
, Mark E. Light
, Chung Che Huang
, Daniel W. Hewak
, Sayani Majumdar
, Ioannis Zeimpekis^*

^*Corresponding author for this work

BA6207 Integrated circuits

University of Southampton
Ludwig Maximilian University of Munich (LMU)

Research output: Contribution to journal › Article › Scientific › peer-review

58 Citations (Scopus)

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GrapheneCore3: Graphene Flagship Core Project 3
Sandberg, H. (Manager), Arpiainen, S. (PI), Smolander, M. (Participant), Soikkeli, M. (Participant) & Ruotsalainen, T. (Participant)
1/04/20 → 30/09/23
Project: EU project