Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary electrical equivalent-circuit blocks constructed of nonlinear voltage-controlled current and charge sources. They are simulated with the harmonic balance method in the RF-simulation program APLAC. Spring softening effects due to the capacitive transducer and spring hardening effects due to the resonator's third order spring coefficient are demonstrated by simulations. For verification, a model for a micromachined high-Q beam resonator structure has been constructed, and its measured large-displacement frequency-domain transfer characteristics are successfully reproduced by model simulations.
|Series||IEEE MTT-S International Microwave Symposium Digest|
|Conference||IEEE MTT-S International Microwave Symposium, IST 2000|
|Period||11/06/00 → 16/06/00|