Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Timo Veijola, Tomi Mattila, Olli Jaakkola, Jyrki Kiihamäki, Tuomas Lamminmäki, Aarne Oja, Kaius Ruokonen, Heikki Seppä, Pekka Seppälä, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    39 Citations (Scopus)

    Abstract

    Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary electrical equivalent-circuit blocks constructed of nonlinear voltage-controlled current and charge sources. They are simulated with the harmonic balance method in the RF-simulation program APLAC. Spring softening effects due to the capacitive transducer and spring hardening effects due to the resonator's third order spring coefficient are demonstrated by simulations. For verification, a model for a micromachined high-Q beam resonator structure has been constructed, and its measured large-displacement frequency-domain transfer characteristics are successfully reproduced by model simulations.
    Original languageEnglish
    Title of host publication2000 IEEE MTT-S International Microwave Symposium Digest
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages99-102
    ISBN (Print)0-7803-5687-X
    DOIs
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication
    EventIEEE MTT-S International Microwave Symposium, IST 2000 - Boston, United States
    Duration: 11 Jun 200016 Jun 2000

    Publication series

    SeriesIEEE MTT-S International Microwave Symposium Digest
    Volume2000
    ISSN0149-645X

    Conference

    ConferenceIEEE MTT-S International Microwave Symposium, IST 2000
    Country/TerritoryUnited States
    CityBoston
    Period11/06/0016/06/00

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