Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Timo Veijola, Tomi Mattila, Olli Jaakkola, Jyrki Kiihamäki, Tuomas Lamminmäki, Aarne Oja, Kaius Ruokonen, Heikki Seppä, Pekka Seppälä, Ilkka Tittonen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

39 Citations (Scopus)

Abstract

Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary electrical equivalent-circuit blocks constructed of nonlinear voltage-controlled current and charge sources. They are simulated with the harmonic balance method in the RF-simulation program APLAC. Spring softening effects due to the capacitive transducer and spring hardening effects due to the resonator's third order spring coefficient are demonstrated by simulations. For verification, a model for a micromachined high-Q beam resonator structure has been constructed, and its measured large-displacement frequency-domain transfer characteristics are successfully reproduced by model simulations.
Original languageEnglish
Title of host publication2000 IEEE MTT-S International Microwave Symposium Digest
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages99-102
ISBN (Print)0-7803-5687-X
DOIs
Publication statusPublished - 2000
MoE publication typeA4 Article in a conference publication
EventIEEE MTT-S International Microwave Symposium, IST 2000 - Boston, United States
Duration: 11 Jun 200016 Jun 2000

Publication series

SeriesIEEE MTT-S International Microwave Symposium Digest
Volume2000
ISSN0149-645X

Conference

ConferenceIEEE MTT-S International Microwave Symposium, IST 2000
CountryUnited States
CityBoston
Period11/06/0016/06/00

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    Veijola, T., Mattila, T., Jaakkola, O., Kiihamäki, J., Lamminmäki, T., Oja, A., Ruokonen, K., Seppä, H., Seppälä, P., & Tittonen, I. (2000). Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method. In 2000 IEEE MTT-S International Microwave Symposium Digest (pp. 99-102). IEEE Institute of Electrical and Electronic Engineers. IEEE MTT-S International Microwave Symposium Digest, Vol.. 2000 https://doi.org/10.1109/MWSYM.2000.860894