@inproceedings{67e0212dc88b45aeb3d1cca087b5d82e,
title = "Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method",
abstract = "Nonlinearities in electrostatically driven micromechanical resonators are studied with circuit simulations. Models for the resonators are built of elementary electrical equivalent-circuit blocks constructed of nonlinear voltage-controlled current and charge sources. They are simulated with the harmonic balance method in the RF-simulation program APLAC. Spring softening effects due to the capacitive transducer and spring hardening effects due to the resonator's third order spring coefficient are demonstrated by simulations. For verification, a model for a micromachined high-Q beam resonator structure has been constructed, and its measured large-displacement frequency-domain transfer characteristics are successfully reproduced by model simulations.",
author = "Timo Veijola and Tomi Mattila and Olli Jaakkola and Jyrki Kiiham{\"a}ki and Tuomas Lamminm{\"a}ki and Aarne Oja and Kaius Ruokonen and Heikki Sepp{\"a} and Pekka Sepp{\"a}l{\"a} and Ilkka Tittonen",
year = "2000",
doi = "10.1109/MWSYM.2000.860894",
language = "English",
isbn = "0-7803-5687-X",
series = "IEEE MTT-S International Microwave Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "99--102",
booktitle = "2000 IEEE MTT-S International Microwave Symposium Digest",
address = "United States",
note = "IEEE MTT-S International Microwave Symposium, IST 2000 ; Conference date: 11-06-2000 Through 16-06-2000",
}