Large-displacement modelling and simulation of micromechanical electrostatically driven resonators using the harmonic balance method

Timo Veijola, Tomi Mattila, Olli Jaakkola, Jyrki Kiihamäki, Tuomas Lamminmäki, Aarne Oja, Kaius Ruokonen, Heikki Seppä, Pekka Seppälä, Ilkka Tittonen

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    39 Citations (Scopus)

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    Engineering & Materials Science