Laser interferometric measurement of lamb wave dispersion and extraction of material parameters in FBARs

Tuomas Pensala, Tapani Makkonen, Juha Vartiainen, Jouni Knuuttila, Jyrki Kaitila, Olli Holmgren, Martti M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    11 Citations (Scopus)

    Abstract

    Laser interferometric measurement and Fourier transformation techniques have been used to extract the dispersion characteristics of a mirror (SMR) type thin film bulk acoustic wave resonator (FBAR). A numerically robust matrix method incorporating anisotropic materials and piezoelectricity has been used to calculate the dispersion curves based on information of the layer thicknesses and material parameters of individual layers. A fit has been performed between the measured and simulated curves thereby allowing the extraction of the material parameters of the ZnO piezolayer. We present the set of material parameters resulting from the fitting.
    Original languageEnglish
    Title of host publication2002 IEEE Ultrasonics Symposium Proceedings
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages977-980
    Volume1
    ISBN (Print)0-7803-7582-3
    DOIs
    Publication statusPublished - 2002
    MoE publication typeA4 Article in a conference publication
    Event2002 IEEE International Ultrasonics Symposium and Short Courses - Munich, Germany
    Duration: 8 Oct 200211 Oct 2002

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium
    Volume2002
    ISSN1051-0117

    Conference

    Conference2002 IEEE International Ultrasonics Symposium and Short Courses
    CountryGermany
    CityMunich
    Period8/10/0211/10/02

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  • Cite this

    Pensala, T., Makkonen, T., Vartiainen, J., Knuuttila, J., Kaitila, J., Holmgren, O., & Salomaa, M. M. (2002). Laser interferometric measurement of lamb wave dispersion and extraction of material parameters in FBARs. In 2002 IEEE Ultrasonics Symposium Proceedings (Vol. 1, pp. 977-980). IEEE Institute of Electrical and Electronic Engineers. Proceedings - IEEE Ultrasonics Symposium, Vol.. 2002 https://doi.org/10.1109/ULTSYM.2002.1193559