@inproceedings{3d06b55d6cde485cbf8283a94c82000b,
title = "Laser interferometric measurement of lamb wave dispersion and extraction of material parameters in FBARs",
abstract = "Laser interferometric measurement and Fourier transformation techniques have been used to extract the dispersion characteristics of a mirror (SMR) type thin film bulk acoustic wave resonator (FBAR). A numerically robust matrix method incorporating anisotropic materials and piezoelectricity has been used to calculate the dispersion curves based on information of the layer thicknesses and material parameters of individual layers. A fit has been performed between the measured and simulated curves thereby allowing the extraction of the material parameters of the ZnO piezolayer. We present the set of material parameters resulting from the fitting.",
author = "Tuomas Pensala and Tapani Makkonen and Juha Vartiainen and Jouni Knuuttila and Jyrki Kaitila and Olli Holmgren and Salomaa, \{Martti M.\}",
year = "2002",
doi = "10.1109/ULTSYM.2002.1193559",
language = "English",
isbn = "978-0-7803-7582-6",
volume = "1",
series = "Proceedings - IEEE Ultrasonics Symposium",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
pages = "977--980",
editor = "Yuhas, \{Donald E.\} and Schneider, \{Susan C.\}",
booktitle = "2002 IEEE Ultrasonics Symposium Proceedings",
address = "United States",
note = "2002 IEEE International Ultrasonics Symposium and Short Courses ; Conference date: 08-10-2002 Through 11-10-2002",
}