| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | IEEE Ultrasonics Symposium, IUS 2010) |
| Publisher | Institute of Electrical and Electronics Engineers Inc. |
| Pages | 416-419 |
| ISBN (Electronic) | 978-1-4577-0381-2 |
| ISBN (Print) | 978-1-4577-0382-9 |
| DOIs | |
| Publication status | Published - 2010 |
| MoE publication type | A4 Article in a conference publication |
| Event | IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States Duration: 11 Oct 2010 → 14 Oct 2010 |
Conference
| Conference | IEEE International Ultrasonics Symposium, IUS 2010 |
|---|---|
| Country | United States |
| City | San Diego, CA |
| Period | 11/10/10 → 14/10/10 |
Cite this
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Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. / Lipiainen, L.; Kokkonen, K.; Jaakkola, Antti; Kaivola, M.
Proceedings : IEEE Ultrasonics Symposium, IUS 2010). Institute of Electrical and Electronics Engineers Inc., 2010. p. 416-419.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators
AU - Lipiainen, L.
AU - Kokkonen, K.
AU - Jaakkola, Antti
AU - Kaivola, M.
PY - 2010
Y1 - 2010
U2 - 10.1109/ULTSYM.2010.5935722
DO - 10.1109/ULTSYM.2010.5935722
M3 - Conference article in proceedings
SN - 978-1-4577-0382-9
SP - 416
EP - 419
BT - Proceedings
PB - Institute of Electrical and Electronics Engineers Inc.
ER -