@inproceedings{60218d27ce7c40a98b9fba008282564f,
title = "Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators",
author = "L. Lipiainen and K. Kokkonen and Antti Jaakkola and M. Kaivola",
year = "2010",
doi = "10.1109/ULTSYM.2010.5935722",
language = "English",
isbn = "978-1-4577-0382-9",
pages = "416--419",
booktitle = "Proceedings",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "IEEE International Ultrasonics Symposium, IUS 2010 ; Conference date: 11-10-2010 Through 14-10-2010",
}