Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

L. Lipiainen, K. Kokkonen, Antti Jaakkola, M. Kaivola

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings
Subtitle of host publication	IEEE Ultrasonics Symposium, IUS 2010)
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	416-419
ISBN (Electronic)	978-1-4577-0381-2
ISBN (Print)	978-1-4577-0382-9
DOIs	https://doi.org/10.1109/ULTSYM.2010.5935722
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	IEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States Duration: 11 Oct 2010 → 14 Oct 2010

Conference	IEEE International Ultrasonics Symposium, IUS 2010
Country/Territory	United States
City	San Diego, CA
Period	11/10/10 → 14/10/10

Access to Document

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title = "Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators",

author = "L. Lipiainen and K. Kokkonen and Antti Jaakkola and M. Kaivola",

year = "2010",

doi = "10.1109/ULTSYM.2010.5935722",

language = "English",

isbn = "978-1-4577-0382-9",

pages = "416--419",

booktitle = "Proceedings",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "IEEE International Ultrasonics Symposium, IUS 2010 ; Conference date: 11-10-2010 Through 14-10-2010",

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Lipiainen, L, Kokkonen, K, Jaakkola, A & Kaivola, M 2010, Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. in Proceedings : IEEE Ultrasonics Symposium, IUS 2010). IEEE Institute of Electrical and Electronic Engineers, pp. 416-419, IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 11/10/10. https://doi.org/10.1109/ULTSYM.2010.5935722

Proceedings : IEEE Ultrasonics Symposium, IUS 2010). IEEE Institute of Electrical and Electronic Engineers, 2010. p. 416-419.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

AU - Lipiainen, L.

AU - Kokkonen, K.

AU - Jaakkola, Antti

AU - Kaivola, M.

PY - 2010

Y1 - 2010

U2 - 10.1109/ULTSYM.2010.5935722

DO - 10.1109/ULTSYM.2010.5935722

M3 - Conference article in proceedings

SN - 978-1-4577-0382-9

SP - 416

EP - 419

BT - Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE International Ultrasonics Symposium, IUS 2010

Y2 - 11 October 2010 through 14 October 2010

ER -