Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

L. Lipiainen, K. Kokkonen, Antti Jaakkola, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, IUS 2010)
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-4577-0381-2
ISBN (Print)978-1-4577-0382-9
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 11 Oct 201014 Oct 2010


ConferenceIEEE International Ultrasonics Symposium, IUS 2010
Country/TerritoryUnited States
CitySan Diego, CA

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