Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

L. Lipiainen, K. Kokkonen, Antti Jaakkola, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, IUS 2010)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages416-419
ISBN (Electronic)978-1-4577-0381-2
ISBN (Print)978-1-4577-0382-9
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 11 Oct 201014 Oct 2010

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period11/10/1014/10/10

Cite this

Lipiainen, L., Kokkonen, K., Jaakkola, A., & Kaivola, M. (2010). Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. In Proceedings : IEEE Ultrasonics Symposium, IUS 2010) (pp. 416-419). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2010.5935722
Lipiainen, L. ; Kokkonen, K. ; Jaakkola, Antti ; Kaivola, M. / Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. Proceedings : IEEE Ultrasonics Symposium, IUS 2010). Institute of Electrical and Electronics Engineers Inc., 2010. pp. 416-419
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Lipiainen, L, Kokkonen, K, Jaakkola, A & Kaivola, M 2010, Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. in Proceedings : IEEE Ultrasonics Symposium, IUS 2010). Institute of Electrical and Electronics Engineers Inc., pp. 416-419, IEEE International Ultrasonics Symposium, IUS 2010, San Diego, CA, United States, 11/10/10. https://doi.org/10.1109/ULTSYM.2010.5935722

Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. / Lipiainen, L.; Kokkonen, K.; Jaakkola, Antti; Kaivola, M.

Proceedings : IEEE Ultrasonics Symposium, IUS 2010). Institute of Electrical and Electronics Engineers Inc., 2010. p. 416-419.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

AU - Lipiainen, L.

AU - Kokkonen, K.

AU - Jaakkola, Antti

AU - Kaivola, M.

PY - 2010

Y1 - 2010

U2 - 10.1109/ULTSYM.2010.5935722

DO - 10.1109/ULTSYM.2010.5935722

M3 - Conference article in proceedings

SN - 978-1-4577-0382-9

SP - 416

EP - 419

BT - Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

ER -

Lipiainen L, Kokkonen K, Jaakkola A, Kaivola M. Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. In Proceedings : IEEE Ultrasonics Symposium, IUS 2010). Institute of Electrical and Electronics Engineers Inc. 2010. p. 416-419 https://doi.org/10.1109/ULTSYM.2010.5935722