Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators

L. Lipiainen, K. Kokkonen, Antti Jaakkola, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE Ultrasonics Symposium, IUS 2010)
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages416-419
ISBN (Electronic)978-1-4577-0381-2
ISBN (Print)978-1-4577-0382-9
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventIEEE International Ultrasonics Symposium, IUS 2010 - San Diego, CA, United States
Duration: 11 Oct 201014 Oct 2010

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2010
CountryUnited States
CitySan Diego, CA
Period11/10/1014/10/10

Cite this

Lipiainen, L., Kokkonen, K., Jaakkola, A., & Kaivola, M. (2010). Laser probe measurements of plate-size related effects on the square-extensional mode of piezoelectrically transduced MEMS resonators. In Proceedings : IEEE Ultrasonics Symposium, IUS 2010) (pp. 416-419). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/ULTSYM.2010.5935722