Laser probing and FEM modeling of ultrasonically vibrating surfaces

P. Tikka; Jyrki Kaitila; Markku Ylilammi; Jukka Knuuttila; Tiina Makkonen; K. Hashimoto; M. Salomaa

doi:10.1109/ULTSYM.1998.765040

Laser probing and FEM modeling of ultrasonically vibrating surfaces

P. Tikka, Jyrki Kaitila, Markku Ylilammi, Jukka Knuuttila, Tiina Makkonen, K. Hashimoto, M. Salomaa

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

6 Citations (Scopus)

Abstract

We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a "toy" model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.

Original language	English
Title of host publication	1998 IEEE Ultrasonics Symposium Proceedings
Publisher	IEEE Institute of Electrical and Electronic Engineers
Number of pages	4
ISBN (Print)	0-7803-4095-7
DOIs	https://doi.org/10.1109/ULTSYM.1998.765040
Publication status	Published - 1998
MoE publication type	B3 Non-refereed article in conference proceedings
Event	IEEE International Ultrasonics Symposium 1998 - Sendai, Japan Duration: 5 Oct 1998 → 8 Oct 1998

Publication series

Series	Proceedings - IEEE Ultrasonics Symposium
Volume	1998
ISSN	1051-0117

Conference

Conference	IEEE International Ultrasonics Symposium 1998
Country/Territory	Japan
City	Sendai
Period	5/10/98 → 8/10/98

Access to Document

10.1109/ULTSYM.1998.765040

Cite this

@inproceedings{f0bf9381274a4e5fa6c31a20168cbbca,

title = "Laser probing and FEM modeling of ultrasonically vibrating surfaces",

abstract = "We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a {"}toy{"} model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.",

author = "P. Tikka and Jyrki Kaitila and Markku Ylilammi and Jukka Knuuttila and Tiina Makkonen and K. Hashimoto and M. Salomaa",

year = "1998",

doi = "10.1109/ULTSYM.1998.765040",

language = "English",

isbn = "0-7803-4095-7",

series = "Proceedings - IEEE Ultrasonics Symposium",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

booktitle = "1998 IEEE Ultrasonics Symposium Proceedings",

address = "United States",

note = "IEEE International Ultrasonics Symposium 1998 ; Conference date: 05-10-1998 Through 08-10-1998",

}

Tikka, P, Kaitila, J, Ylilammi, M, Knuuttila, J, Makkonen, T, Hashimoto, K & Salomaa, M 1998, Laser probing and FEM modeling of ultrasonically vibrating surfaces. in 1998 IEEE Ultrasonics Symposium Proceedings., 179, IEEE Institute of Electrical and Electronic Engineers, Proceedings - IEEE Ultrasonics Symposium, vol. 1998, IEEE International Ultrasonics Symposium 1998, Sendai, Japan, 5/10/98. https://doi.org/10.1109/ULTSYM.1998.765040

Laser probing and FEM modeling of ultrasonically vibrating surfaces. / Tikka, P.; Kaitila, Jyrki; Ylilammi, Markku et al.
1998 IEEE Ultrasonics Symposium Proceedings. IEEE Institute of Electrical and Electronic Engineers, 1998. 179 (Proceedings - IEEE Ultrasonics Symposium, Vol. 1998).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

TY - GEN

T1 - Laser probing and FEM modeling of ultrasonically vibrating surfaces

AU - Tikka, P.

AU - Kaitila, Jyrki

AU - Ylilammi, Markku

AU - Knuuttila, Jukka

AU - Makkonen, Tiina

AU - Hashimoto, K.

AU - Salomaa, M.

PY - 1998

Y1 - 1998

N2 - We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a "toy" model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.

AB - We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a "toy" model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.

U2 - 10.1109/ULTSYM.1998.765040

DO - 10.1109/ULTSYM.1998.765040

M3 - Conference article in proceedings

SN - 0-7803-4095-7

T3 - Proceedings - IEEE Ultrasonics Symposium

BT - 1998 IEEE Ultrasonics Symposium Proceedings

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - IEEE International Ultrasonics Symposium 1998

Y2 - 5 October 1998 through 8 October 1998

ER -

Laser probing and FEM modeling of ultrasonically vibrating surfaces

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