Laser probing and FEM modeling of ultrasonically vibrating surfaces

P. Tikka, Jyrki Kaitila, Markku Ylilammi, Jukka Knuuttila, Tiina Makkonen, K. Hashimoto, M. Salomaa

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    6 Citations (Scopus)


    We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a "toy" model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.
    Original languageEnglish
    Title of host publication1998 IEEE Ultrasonics Symposium Proceedings
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Number of pages4
    ISBN (Print)0-7803-4095-7
    Publication statusPublished - 1998
    MoE publication typeB3 Non-refereed article in conference proceedings
    EventIEEE International Ultrasonics Symposium 1998 - Sendai, Japan
    Duration: 5 Oct 19988 Oct 1998

    Publication series

    SeriesProceedings - IEEE Ultrasonics Symposium


    ConferenceIEEE International Ultrasonics Symposium 1998


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