We have probed ultrasonic vibrations of a piezoelectric thin film utilizing a scanning laser interferometric technique. The vibrations are also simulated using a "toy" model of a membrane of zero thickness, and applying 2D FEM modeling for the solution of the eigenmodes. Despite the strong truncations used in the modeling, the agreement between our simulations and the measurements for several of the modes is striking. The samples were fabricated by patterning thin films photolithographically.
|Series||Proceedings - IEEE Ultrasonics Symposium|
|Conference||IEEE International Ultrasonics Symposium 1998|
|Period||5/10/98 → 8/10/98|