Laser probing of nonlinearities in MEMS resonators

L. Lipiainen, Antti Jaakkola, K. Kokkonen, M. Kaivola

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)


Nonlinear effects have become an important issue in microacoustic component development to improve performance. In addition to the modeling, simulations and electrical characterization tools, a direct method for observing the nonlinear vibration fields in these components would be beneficial in the device design. We use laser probing for studying the nonlinear acoustic behavior in two square-extensional (SE) mode MEMS resonators, whose electrically measured SE-resonances compress above a certain, unexpectedly low, input drive power level. In the laser probe measurements, the vibration amplitude of the SE mode is observed to nearly saturate above this drive power level, and simultaneously another mode at a different frequency is excited. It is also observed that the nonlinearly excited modes are different in the two resonators, and each resonator has a distinct nonlinear behavior.
Original languageEnglish
Title of host publicationProceedings
Subtitle of host publicationIEEE International Ultrasonics Symposium, IUS 2012
PublisherIEEE Institute of Electrical and Electronic Engineers
ISBN (Electronic)978-1-4673-4562-0
ISBN (Print)978-1-4673-4561-3
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventIEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany
Duration: 7 Oct 201210 Oct 2012


ConferenceIEEE International Ultrasonics Symposium, IUS 2012
Abbreviated titleIUS 2012


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