Abstract
Nonlinear effects have become an important issue in
microacoustic component development to improve
performance. In addition to the modeling, simulations and
electrical characterization tools, a direct method for
observing the nonlinear vibration fields in these
components would be beneficial in the device design. We
use laser probing for studying the nonlinear acoustic
behavior in two square-extensional (SE) mode MEMS
resonators, whose electrically measured SE-resonances
compress above a certain, unexpectedly low, input drive
power level. In the laser probe measurements, the
vibration amplitude of the SE mode is observed to nearly
saturate above this drive power level, and simultaneously
another mode at a different frequency is excited. It is
also observed that the nonlinearly excited modes are
different in the two resonators, and each resonator has a
distinct nonlinear behavior.
| Original language | English |
|---|---|
| Title of host publication | Proceedings |
| Subtitle of host publication | IEEE International Ultrasonics Symposium, IUS 2012 |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 52-55 |
| ISBN (Electronic) | 978-1-4673-4562-0 |
| ISBN (Print) | 978-1-4673-4561-3 |
| DOIs | |
| Publication status | Published - 2012 |
| MoE publication type | Not Eligible |
| Event | IEEE International Ultrasonics Symposium, IUS 2012 - Dresden, Germany Duration: 7 Oct 2012 → 10 Oct 2012 |
Conference
| Conference | IEEE International Ultrasonics Symposium, IUS 2012 |
|---|---|
| Abbreviated title | IUS 2012 |
| Country/Territory | Germany |
| City | Dresden |
| Period | 7/10/12 → 10/10/12 |