Laser profilometer module based on a low-temperature cofired ceramic substrate

Veli Heikkinen (Corresponding Author), Mikko Heikkinen, Kimmo Keränen, Risto Mitikka, Veli-Pekka Putila, Kari Tukkiniemi

Research output: Contribution to journalArticleScientificpeer-review


We realized a laser profilometer module using low temperature cofired ceramics technology. The device consists of a vertical-cavity surface-emitting laser as the light source and a complementary metal oxide semiconductor image sensor as the detector. The laser transmitter produces a thin light stripe on the measurable object, and the receiver calculates the distance profile using triangulation. Because the design of optoelectronic modules, such as the laser profilometer, is usually carried out using specialized software, its electronic compatibility is very important. We developed a data transmission network using commercial optical, electrical, and mechanical design software, which enabled us to electronically transfer data between the designers. The module electronics were realized with multilayer ceramics technology that eases component assembly by providing precision alignment features in the substrate. The housing was manufactured from aluminum using electronic data transfer from the mechanical design software to the five-axis milling workstation. Target distance profiles were obtained from 100 points with an accuracy varying from 0.1 mm at a 5-cm distance to 2 cm at 1.5 m. The module has potential for distance measurement in portable devices where small size, light weight, and low power consumption are important.
Original languageEnglish
Article number093603
Number of pages7
JournalOptical Engineering
Issue number9
Publication statusPublished - 2005
MoE publication typeA1 Journal article-refereed


  • surface topography measurement
  • ceramics
  • surface emitting lasers
  • light sources
  • CMOS image sensors
  • distance measurement
  • optical multilayers
  • optical materials
  • optical design techniques
  • optoelectronic devices
  • semiconductor lasers
  • laser diodes
  • diode laser
  • profilometers

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