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Laser profilometer module based on a low-temperature cofired ceramic substrate

  • Veli Heikkinen*
  • , Mikko Heikkinen
  • , Kimmo Keränen
  • , Risto Mitikka
  • , Veli-Pekka Putila
  • , Kari Tukkiniemi
    • *Corresponding author for this work
    • Polar Electro Oy

    Research output: Contribution to journal › Article › Scientific › peer-review

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