Lateral bulk acoustic wave filter

Acoustic wave filter devices is disclosed. The device includes a piezoelectric layer, an input electrode and an output electrode located on a top surface of the piezoelectric layer and physically separated from one another, and a counter electrode having a top surface connected to a bottom surface of the piezoelectric layer. The input and output electrodes each include a base and at least one extension extending from the base. The at least one extension of the input electrode extending alongside and in a generally opposite direction to and separated by a gap width from an adjacent extension of the at least one extensions of the output electrode. In some embodiments, the at least one extension of the input or output electrodes has a width that can changes from a first end of the at least one extension to a second end.

Patent family as of 14.7.2026
CN112689956 A, CN112689956 B, EP3850752 A1, JP2022500972 T2, JP2025010594 A2, US10756696 BB, US11381220 BB, US2020083863 AA, US2021036677 AA, WO20053151 A1