Abstract
| Original language | English |
|---|---|
| Title of host publication | 2018 IEEE International Ultrasonics Symposium |
| Subtitle of host publication | IUS 2018 |
| Publisher | IEEE Institute of Electrical and Electronic Engineers |
| Pages | 1-4 |
| Number of pages | 4 |
| ISBN (Electronic) | 978-1-5386-3425-7 |
| ISBN (Print) | 978-1-5386-3426-4 |
| DOIs | |
| Publication status | Published - 2018 |
| MoE publication type | Not Eligible |
| Event | IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 22 Oct 2018 → 25 Oct 2018 |
Conference
| Conference | IEEE International Ultrasonics Symposium, IUS 2018 |
|---|---|
| Abbreviated title | IUS 2018 |
| Country | Japan |
| City | Kobe |
| Period | 22/10/18 → 25/10/18 |
Fingerprint
Keywords
- Passband
- Resonators
- Electrodes
- Acoustics
- Bandwidth
- Insertion loss
Cite this
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Laterally acoustically coupled BAW filters at 3.6 GHz. / Pensala, Tuomas; Makkonen, Tapani; Dekker, James R.; Ylilammi, Markku.
2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 2018. p. 1-4.Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review
TY - GEN
T1 - Laterally acoustically coupled BAW filters at 3.6 GHz
AU - Pensala, Tuomas
AU - Makkonen, Tapani
AU - Dekker, James R.
AU - Ylilammi, Markku
PY - 2018
Y1 - 2018
N2 - Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
AB - Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
KW - Passband
KW - Resonators
KW - Electrodes
KW - Acoustics
KW - Bandwidth
KW - Insertion loss
UR - http://www.scopus.com/inward/record.url?scp=85062487462&partnerID=8YFLogxK
U2 - 10.1109/ULTSYM.2018.8579900
DO - 10.1109/ULTSYM.2018.8579900
M3 - Conference article in proceedings
SN - 978-1-5386-3426-4
SP - 1
EP - 4
BT - 2018 IEEE International Ultrasonics Symposium
PB - IEEE Institute of Electrical and Electronic Engineers
ER -