Laterally acoustically coupled BAW filters at 3.6 GHz

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    Abstract

    Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium
    Subtitle of host publicationIUS 2018
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1-4
    Number of pages4
    ISBN (Electronic)978-1-5386-3425-7
    ISBN (Print)978-1-5386-3426-4
    DOIs
    Publication statusPublished - 2018
    MoE publication typeNot Eligible
    EventIEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 22 Oct 201825 Oct 2018

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2018
    Abbreviated titleIUS 2018
    CountryJapan
    CityKobe
    Period22/10/1825/10/18

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    Keywords

    • Passband
    • Resonators
    • Electrodes
    • Acoustics
    • Bandwidth
    • Insertion loss

    Cite this

    Pensala, T., Makkonen, T., Dekker, J. R., & Ylilammi, M. (2018). Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018 (pp. 1-4). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2018.8579900