Laterally acoustically coupled BAW filters at 3.6 GHz

Tuomas Pensala; Tapani Makkonen; James R. Dekker; Markku Ylilammi

doi:10.1109/ULTSYM.2018.8579900

Laterally acoustically coupled BAW filters at 3.6 GHz

Tuomas Pensala, Tapani Makkonen, James R. Dekker, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.

Original language	English
Title of host publication	2018 IEEE International Ultrasonics Symposium
Subtitle of host publication	IUS 2018
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	1-4
Number of pages	4
ISBN (Electronic)	978-1-5386-3425-7
ISBN (Print)	978-1-5386-3426-4
DOIs	https://doi.org/10.1109/ULTSYM.2018.8579900
Publication status	Published - 2018
MoE publication type	Not Eligible
Event	IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 22 Oct 2018 → 25 Oct 2018

Conference

Conference	IEEE International Ultrasonics Symposium, IUS 2018
Abbreviated title	IUS 2018
Country	Japan
City	Kobe
Period	22/10/18 → 25/10/18

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Keywords

Passband
Resonators
Electrodes
Acoustics
Bandwidth
Insertion loss

Cite this

Pensala, T., Makkonen, T., Dekker, J. R., & Ylilammi, M. (2018). Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018 (pp. 1-4). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2018.8579900

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Laterally acoustically coupled BAW filters at 3.6 GHz. / Pensala, Tuomas ; Makkonen, Tapani ; Dekker, James R.; Ylilammi, Markku.

2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 2018. p. 1-4.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

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AB - Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.

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KW - Resonators

KW - Electrodes

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KW - Bandwidth

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Access to Document

10.1109/ULTSYM.2018.8579900

Link to publication in Scopus