Laterally acoustically coupled BAW filters at 3.6 GHz

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    Abstract

    Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
    Original languageEnglish
    Title of host publication2018 IEEE International Ultrasonics Symposium
    Subtitle of host publicationIUS 2018
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages1-4
    Number of pages4
    ISBN (Electronic)978-1-5386-3425-7
    ISBN (Print)978-1-5386-3426-4
    DOIs
    Publication statusPublished - 2018
    MoE publication typeNot Eligible
    EventIEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
    Duration: 22 Oct 201825 Oct 2018

    Conference

    ConferenceIEEE International Ultrasonics Symposium, IUS 2018
    Abbreviated titleIUS 2018
    CountryJapan
    CityKobe
    Period22/10/1825/10/18

    Fingerprint

    Aluminum nitride
    Insertion losses
    Bandwidth

    Keywords

    • Passband
    • Resonators
    • Electrodes
    • Acoustics
    • Bandwidth
    • Insertion loss

    Cite this

    Pensala, T., Makkonen, T., Dekker, J. R., & Ylilammi, M. (2018). Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018 (pp. 1-4). IEEE Institute of Electrical and Electronic Engineers . https://doi.org/10.1109/ULTSYM.2018.8579900
    Pensala, Tuomas ; Makkonen, Tapani ; Dekker, James R. ; Ylilammi, Markku. / Laterally acoustically coupled BAW filters at 3.6 GHz. 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 2018. pp. 1-4
    @inproceedings{407c71f7c0884b94b771f60642754084,
    title = "Laterally acoustically coupled BAW filters at 3.6 GHz",
    abstract = "Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 {\%} with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.",
    keywords = "Passband, Resonators, Electrodes, Acoustics, Bandwidth, Insertion loss",
    author = "Tuomas Pensala and Tapani Makkonen and Dekker, {James R.} and Markku Ylilammi",
    year = "2018",
    doi = "10.1109/ULTSYM.2018.8579900",
    language = "English",
    isbn = "978-1-5386-3426-4",
    pages = "1--4",
    booktitle = "2018 IEEE International Ultrasonics Symposium",
    publisher = "IEEE Institute of Electrical and Electronic Engineers",
    address = "United States",

    }

    Pensala, T, Makkonen, T, Dekker, JR & Ylilammi, M 2018, Laterally acoustically coupled BAW filters at 3.6 GHz. in 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , pp. 1-4, IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 22/10/18. https://doi.org/10.1109/ULTSYM.2018.8579900

    Laterally acoustically coupled BAW filters at 3.6 GHz. / Pensala, Tuomas; Makkonen, Tapani; Dekker, James R.; Ylilammi, Markku.

    2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers , 2018. p. 1-4.

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    TY - GEN

    T1 - Laterally acoustically coupled BAW filters at 3.6 GHz

    AU - Pensala, Tuomas

    AU - Makkonen, Tapani

    AU - Dekker, James R.

    AU - Ylilammi, Markku

    PY - 2018

    Y1 - 2018

    N2 - Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.

    AB - Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.

    KW - Passband

    KW - Resonators

    KW - Electrodes

    KW - Acoustics

    KW - Bandwidth

    KW - Insertion loss

    UR - http://www.scopus.com/inward/record.url?scp=85062487462&partnerID=8YFLogxK

    U2 - 10.1109/ULTSYM.2018.8579900

    DO - 10.1109/ULTSYM.2018.8579900

    M3 - Conference article in proceedings

    SN - 978-1-5386-3426-4

    SP - 1

    EP - 4

    BT - 2018 IEEE International Ultrasonics Symposium

    PB - IEEE Institute of Electrical and Electronic Engineers

    ER -

    Pensala T, Makkonen T, Dekker JR, Ylilammi M. Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018. IEEE Institute of Electrical and Electronic Engineers . 2018. p. 1-4 https://doi.org/10.1109/ULTSYM.2018.8579900