Laterally acoustically coupled BAW filters at 3.6 GHz

Tuomas Pensala, Tapani Makkonen, James R. Dekker, Markku Ylilammi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
Original languageEnglish
Title of host publication2018 IEEE International Ultrasonics Symposium
Subtitle of host publicationIUS 2018
PublisherInstitute of Electrical and Electronic Engineers IEEE
Pages1-4
Number of pages4
ISBN (Electronic)978-1-5386-3425-7
ISBN (Print)978-1-5386-3426-4
DOIs
Publication statusPublished - 2018
MoE publication typeNot Eligible
EventIEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan
Duration: 22 Oct 201825 Oct 2018

Conference

ConferenceIEEE International Ultrasonics Symposium, IUS 2018
Abbreviated titleIUS 2018
CountryJapan
CityKobe
Period22/10/1825/10/18

Fingerprint

Aluminum nitride
Insertion losses
Bandwidth

Keywords

  • Passband
  • Resonators
  • Electrodes
  • Acoustics
  • Bandwidth
  • Insertion loss

Cite this

Pensala, T., Makkonen, T., Dekker, J. R., & Ylilammi, M. (2018). Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018 (pp. 1-4). Institute of Electrical and Electronic Engineers IEEE. https://doi.org/10.1109/ULTSYM.2018.8579900
Pensala, Tuomas ; Makkonen, Tapani ; Dekker, James R. ; Ylilammi, Markku. / Laterally acoustically coupled BAW filters at 3.6 GHz. 2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 2018. pp. 1-4
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Pensala, T, Makkonen, T, Dekker, JR & Ylilammi, M 2018, Laterally acoustically coupled BAW filters at 3.6 GHz. in 2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE, pp. 1-4, IEEE International Ultrasonics Symposium, IUS 2018, Kobe, Japan, 22/10/18. https://doi.org/10.1109/ULTSYM.2018.8579900

Laterally acoustically coupled BAW filters at 3.6 GHz. / Pensala, Tuomas; Makkonen, Tapani; Dekker, James R.; Ylilammi, Markku.

2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE, 2018. p. 1-4.

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Pensala T, Makkonen T, Dekker JR, Ylilammi M. Laterally acoustically coupled BAW filters at 3.6 GHz. In 2018 IEEE International Ultrasonics Symposium: IUS 2018. Institute of Electrical and Electronic Engineers IEEE. 2018. p. 1-4 https://doi.org/10.1109/ULTSYM.2018.8579900