Abstract
Laterally acoustically coupled BAW (LBAW) filters based on solidly mounted aluminium nitride microacoustics technology were designed and fabricated for 3.6 GHz frequency. The layer thicknesses and critical dimensions remain easily manufacturable and do not limit the performance significantly. The filters exhibit inductor-matched relative bandwidth of 4.1 % with minimum insertion loss of 2.6 dB. The passband of the 3.6 GHz filter shows the same shape than that for the earlier demonstrated 1.86 GHz filter, with short range ripple reduced and a parasitic sideband at a lower frequency suppressed below -10 dB by re-design.
Original language | English |
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Title of host publication | 2018 IEEE International Ultrasonics Symposium |
Subtitle of host publication | IUS 2018 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 1-4 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-5386-3425-7 |
ISBN (Print) | 978-1-5386-3426-4 |
DOIs | |
Publication status | Published - 2018 |
MoE publication type | Not Eligible |
Event | IEEE International Ultrasonics Symposium, IUS 2018 - Kobe, Japan Duration: 22 Oct 2018 → 25 Oct 2018 |
Conference
Conference | IEEE International Ultrasonics Symposium, IUS 2018 |
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Abbreviated title | IUS 2018 |
Country/Territory | Japan |
City | Kobe |
Period | 22/10/18 → 25/10/18 |
Keywords
- Passband
- Resonators
- Electrodes
- Acoustics
- Bandwidth
- Insertion loss
- OtaNano