Laterally coupled bulk acoustic wave filter with improved passband characteristics

Johanna Meltaus (Inventor), Tuomas Pensala (Inventor)

Research output: PatentPatent


The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.

Patent family as of 7.10.2021
CN104205632 A 20141210 CN201280066944 20121109      
EP2777153 A1 20140917 EP20120847501 20121109      
EP2777153 A4 20151223 EP20120847501 20121109      
EP2777153 B1 20210818 EP20120847501 20121109
FI20116113 A 20130512 FI20110006113 20111111      
JP2015502065 T2 20150119 JP20140540529T 20121109      
JP2018129839 A2 20180816 JP20180052320 20180320      
JP6564096 B2 20190821 JP20180052320 20180320      
KR101977334 B1 20190510 KR20147015834 20121109      
KR20140101773 A 20140820 KR20147015834 20121109      
US2014312994 AA 20141023 US20120357220 20121109      
US9219466 BB 20151222 US20120357220 20121109      
WO13068652 A1 20130516 WO2012FI51096 20121109

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Original languageEnglish
Patent numberUS2014312994
IPCH03H 9/ 54 A I
Priority date9/11/12
Publication statusPublished - 23 Oct 2014
MoE publication typeH1 Granted patent


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