Laterally coupled bulk acoustic wave filter with improved passband characteristics

Johanna Meltaus; Tuomas Pensala

Laterally coupled bulk acoustic wave filter with improved passband characteristics

Johanna Meltaus (Inventor)
, Tuomas Pensala (Inventor)

Research output: Patent › Patent

Abstract

The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands.

Patent family as of 7.10.2021
CN104205632 A 20141210 CN201280066944 20121109
EP2777153 A1 20140917 EP20120847501 20121109
EP2777153 A4 20151223 EP20120847501 20121109
EP2777153 B1 20210818 EP20120847501 20121109
FI20116113 A 20130512 FI20110006113 20111111
JP2015502065 T2 20150119 JP20140540529T 20121109
JP2018129839 A2 20180816 JP20180052320 20180320
JP6564096 B2 20190821 JP20180052320 20180320
KR101977334 B1 20190510 KR20147015834 20121109
KR20140101773 A 20140820 KR20147015834 20121109
US2014312994 AA 20141023 US20120357220 20121109
US9219466 BB 20151222 US20120357220 20121109
WO13068652 A1 20130516 WO2012FI51096 20121109

Link to current patent family on right

Original language	English
Patent number	US2014312994
IPC	H03H 9/ 54 A I
Priority date	9/11/12
Publication status	Published - 23 Oct 2014
MoE publication type	H1 Granted patent

Cite this

@misc{1dc0498155384b31b992f38b94030b8d,

title = "Laterally coupled bulk acoustic wave filter with improved passband characteristics",

abstract = "The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands. Patent family as of 7.10.2021 CN104205632 A 20141210 CN201280066944 20121109 EP2777153 A1 20140917 EP20120847501 20121109 EP2777153 A4 20151223 EP20120847501 20121109 EP2777153 B1 20210818 EP20120847501 20121109 FI20116113 A 20130512 FI20110006113 20111111 JP2015502065 T2 20150119 JP20140540529T 20121109 JP2018129839 A2 20180816 JP20180052320 20180320 JP6564096 B2 20190821 JP20180052320 20180320 KR101977334 B1 20190510 KR20147015834 20121109 KR20140101773 A 20140820 KR20147015834 20121109 US2014312994 AA 20141023 US20120357220 20121109 US9219466 BB 20151222 US20120357220 20121109 WO13068652 A1 20130516 WO2012FI51096 20121109 Link to current patent family on right ",

author = "Johanna Meltaus and Tuomas Pensala",

year = "2014",

month = oct,

day = "23",

language = "English",

type = "Patent",

note = "US2014312994; H03H 9/ 54 A I",

}

TY - PAT

T1 - Laterally coupled bulk acoustic wave filter with improved passband characteristics

AU - Meltaus, Johanna

AU - Pensala, Tuomas

PY - 2014/10/23

Y1 - 2014/10/23

N2 - The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands. Patent family as of 7.10.2021 CN104205632 A 20141210 CN201280066944 20121109 EP2777153 A1 20140917 EP20120847501 20121109 EP2777153 A4 20151223 EP20120847501 20121109 EP2777153 B1 20210818 EP20120847501 20121109 FI20116113 A 20130512 FI20110006113 20111111 JP2015502065 T2 20150119 JP20140540529T 20121109 JP2018129839 A2 20180816 JP20180052320 20180320 JP6564096 B2 20190821 JP20180052320 20180320 KR101977334 B1 20190510 KR20147015834 20121109 KR20140101773 A 20140820 KR20147015834 20121109 US2014312994 AA 20141023 US20120357220 20121109 US9219466 BB 20151222 US20120357220 20121109 WO13068652 A1 20130516 WO2012FI51096 20121109 Link to current patent family on right

AB - The invention relates to a laterally coupled bulk acoustic wave (LBAW) filter comprising a vibration layer for carrying bulk acoustic waves, electrode means comprising a first electrode coupled to the vibration layer for exciting to the vibration layer at least one longitudinal wave mode having a first frequency band and one shear wave mode having a second frequency band, and a second electrode coupled to the vibration layer for sensing the filter pass signal, the first and second electrodes being laterally arranged with respect to each other, and an acoustic reflector structure in acoustic connection with the vibration layer. According to the invention, the reflector structure is adapted to acoustically isolate the vibration layer from its surroundings at the first frequency band more efficiently than at the second frequency band for suppressing the effect of the shear wave mode at the second frequency band from the filter pass signal. The invention helps to improve the quality of LBAW filter passbands. Patent family as of 7.10.2021 CN104205632 A 20141210 CN201280066944 20121109 EP2777153 A1 20140917 EP20120847501 20121109 EP2777153 A4 20151223 EP20120847501 20121109 EP2777153 B1 20210818 EP20120847501 20121109 FI20116113 A 20130512 FI20110006113 20111111 JP2015502065 T2 20150119 JP20140540529T 20121109 JP2018129839 A2 20180816 JP20180052320 20180320 JP6564096 B2 20190821 JP20180052320 20180320 KR101977334 B1 20190510 KR20147015834 20121109 KR20140101773 A 20140820 KR20147015834 20121109 US2014312994 AA 20141023 US20120357220 20121109 US9219466 BB 20151222 US20120357220 20121109 WO13068652 A1 20130516 WO2012FI51096 20121109 Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/048288592/publication/US9219466B2?q=US9219466

M3 - Patent

M1 - US2014312994

ER -

Laterally coupled bulk acoustic wave filter with improved passband characteristics

Abstract

Other files and links

Fingerprint

Cite this