Abstract
The N content and lattice parameter of GaNxAs1−xepilayers on GaAs (0<x<0.03) were determined by secondary ion mass spectroscopy and x-ray diffraction measurements, respectively. A significant deviation of the lattice parameter variation in GaNxAs1−x from Vegard’s law between GaAs and cubic GaN was observed, which leads to overestimation of the nitrogen content by up to 30% for x⩽2.5%. The physical origin of this negative deviation is discussed.
Original language | English |
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Pages (from-to) | 2864-2866 |
Journal | Applied Physics Letters |
Volume | 78 |
Issue number | 19 |
DOIs | |
Publication status | Published - 2001 |
MoE publication type | A1 Journal article-refereed |