Abstract
The N content and lattice parameter of GaNxAs1−xepilayers on GaAs (0<x<0.03) were determined by secondary ion mass spectroscopy and x-ray diffraction measurements, respectively. A significant deviation of the lattice parameter variation in GaNxAs1−x from Vegard’s law between GaAs and cubic GaN was observed, which leads to overestimation of the nitrogen content by up to 30% for x⩽2.5%. The physical origin of this negative deviation is discussed.
| Original language | English |
|---|---|
| Pages (from-to) | 2864-2866 |
| Journal | Applied Physics Letters |
| Volume | 78 |
| Issue number | 19 |
| DOIs | |
| Publication status | Published - 2001 |
| MoE publication type | A1 Journal article-refereed |