Launching of multi-project wafer runs in ePIXfab with micron-scale silicon rib waveguide technology

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    6 Citations (Scopus)

    Abstract

    Silicon photonics is a rapidly growing R&D field where universities, institutes and companies are all involved and the business expectations for the next few years are high. One of the key enabling elements that led to the present success of silicon photonics is ePIXfab. It is a consortium of institutes that has together offered multi-project wafer (MPW) runs, packaging services, training, and feasibility studies. These services have significantly lowered the barrier of various research groups and companies to start developing silicon photonics. Until now the MPW services have been offered by the ePIXfab partners IMEC, CEA-Leti and IHP, which all use CMOS-type silicon photonics technology with a typical silicon-on-insulator (SOI) waveguide thickness of 220 nm. In November 2013 this MPW offering was expanded by the ePIXfab partner VTT that opened the access to its 3 µm SOI waveguide platform via ePIXfab MPW runs. This technology platform is complementary to the mainstream silicon photonics technology (220 nm) and it offers such benefits as very low losses, small polarization dependency, ultrabroadband operation and low starting costs.
    Original languageEnglish
    Title of host publicationSPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-081949903-5
    DOIs
    Publication statusPublished - 2014
    MoE publication typeA4 Article in a conference publication
    EventSilicon Photonics IX - San Francisco, United States
    Duration: 3 Feb 20145 Feb 2014

    Publication series

    SeriesProceedings of SPIE
    Volume8990

    Conference

    ConferenceSilicon Photonics IX
    CountryUnited States
    CitySan Francisco
    Period3/02/145/02/14

    Keywords

    • silicon photonics
    • waveguides
    • packaging
    • polarization
    • multi-project wafers
    • silicion-on-insulators

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  • Cite this

    Aalto, T., Cherchi, M., Harjanne, M., Ylinen, S., Kapulainen, M., & Vehmas, T. (2014). Launching of multi-project wafer runs in ePIXfab with micron-scale silicon rib waveguide technology. In SPIE Photonics West 2014-OPTO: Optoelectronic Devices and Materials [899003] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8990 https://doi.org/10.1117/12.2038989