Lift-Off process for nanoimprint lithography

P. Carlberg, M. Graczyk, E.L. Sarwe, I. Maximov, M. Beck, Montelius, Sotomayor Torres, C.H. Cardinaud, Pfeiffer,K s), Reuther, Fink, Grueztner, Jouni Ahopelto, Tomi Haatainen, C. Mayer

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

Original languageEnglish
Title of host publicationProceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002
Place of PublicationSan Francisco
Pages91-92
Publication statusPublished - 2002
Event1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States
Duration: 11 Dec 200213 Dec 2002

Conference

Conference1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated titleNNT 2002
CountryUnited States
CitySan Francisco
Period11/12/0213/12/02

Keywords

  • Nanoimprint Lithography

Cite this

Carlberg, P., Graczyk, M., Sarwe, E. L., Maximov, I., Beck, M., Montelius, ... Mayer, C. (2002). Lift-Off process for nanoimprint lithography. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002 (pp. 91-92). San Francisco.
Carlberg, P. ; Graczyk, M. ; Sarwe, E.L. ; Maximov, I. ; Beck, M. ; Montelius ; Sotomayor Torres ; Cardinaud, C.H. ; s), Pfeiffer,K ; Reuther ; Fink ; Grueztner, ; Ahopelto, Jouni ; Haatainen, Tomi ; Mayer, C. / Lift-Off process for nanoimprint lithography. Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. San Francisco, 2002. pp. 91-92
@inbook{16889439138c40d38562362c7c55876b,
title = "Lift-Off process for nanoimprint lithography",
keywords = "Nanoimprint Lithography",
author = "P. Carlberg and M. Graczyk and E.L. Sarwe and I. Maximov and M. Beck and Montelius and {Sotomayor Torres} and C.H. Cardinaud and Pfeiffer,K s) and Reuther and Fink and Grueztner and Jouni Ahopelto and Tomi Haatainen and C. Mayer",
year = "2002",
language = "English",
pages = "91--92",
booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002",

}

Carlberg, P, Graczyk, M, Sarwe, EL, Maximov, I, Beck, M, Montelius, Sotomayor Torres, Cardinaud, CH, s), PK, Reuther, Fink, Grueztner, , Ahopelto, J, Haatainen, T & Mayer, C 2002, Lift-Off process for nanoimprint lithography. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. San Francisco, pp. 91-92, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Lift-Off process for nanoimprint lithography. / Carlberg, P.; Graczyk, M.; Sarwe, E.L.; Maximov, I.; Beck, M.; Montelius; Sotomayor Torres; Cardinaud, C.H.; s), Pfeiffer,K; Reuther; Fink; Grueztner, ; Ahopelto, Jouni; Haatainen, Tomi; Mayer, C.

Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. San Francisco, 2002. p. 91-92.

Research output: Chapter in Book/Report/Conference proceedingConference abstract in proceedingsScientific

TY - CHAP

T1 - Lift-Off process for nanoimprint lithography

AU - Carlberg, P.

AU - Graczyk, M.

AU - Sarwe, E.L.

AU - Maximov, I.

AU - Beck, M.

AU - Montelius, null

AU - Sotomayor Torres, null

AU - Cardinaud, C.H.

AU - s), Pfeiffer,K

AU - Reuther, null

AU - Fink, null

AU - Grueztner, null

AU - Ahopelto, Jouni

AU - Haatainen, Tomi

AU - Mayer, C.

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 91

EP - 92

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002

CY - San Francisco

ER -

Carlberg P, Graczyk M, Sarwe EL, Maximov I, Beck M, Montelius et al. Lift-Off process for nanoimprint lithography. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. San Francisco. 2002. p. 91-92