Lift-Off process for nanoimprint lithography

P. Carlberg; M. Graczyk; E.L. Sarwe; I. Maximov; M. Beck; L. Montelius; C.M. Sotomayor Torres; C.H. Cardinaud; K. Pfeiffer; F. Reuther; M. Fink; G. Grueztner; Jouni Ahopelto; Tomi Haatainen; C. Mayer

Lift-Off process for nanoimprint lithography

P. Carlberg, M. Graczyk, E.L. Sarwe, I. Maximov, M. Beck, L. Montelius, C.M. Sotomayor Torres, C.H. Cardinaud, K. Pfeiffer, F. Reuther, M. Fink, G. Grueztner, Jouni Ahopelto, Tomi Haatainen, C. Mayer

VTT Technical Research Centre of Finland

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

Original language	English
Title of host publication	Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002
Place of Publication	San Francisco
Publisher	Naval Research Laboratory
Pages	91-92
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 - San Francisco, United States Duration: 11 Dec 2002 → 13 Dec 2002 http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Conference

Conference	1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02
Abbreviated title	NNT 2002
Country/Territory	United States
City	San Francisco
Period	11/12/02 → 13/12/02
Internet address	http://www.nntconf.org/pdf/2002ProgramSchedule.pdf (Conference Programme)

Keywords

Nanoimprint Lithography

Cite this

Carlberg, P., Graczyk, M., Sarwe, E. L., Maximov, I., Beck, M., Montelius, L., Sotomayor Torres, C. M., Cardinaud, C. H., Pfeiffer, K., Reuther, F., Fink, M., Grueztner, G., Ahopelto, J., Haatainen, T., & Mayer, C. (2002). Lift-Off process for nanoimprint lithography. In Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002 (pp. 91-92). Naval Research Laboratory.

@inbook{16889439138c40d38562362c7c55876b,

title = "Lift-Off process for nanoimprint lithography",

keywords = "Nanoimprint Lithography",

author = "P. Carlberg and M. Graczyk and E.L. Sarwe and I. Maximov and M. Beck and L. Montelius and {Sotomayor Torres}, C.M. and C.H. Cardinaud and K. Pfeiffer and F. Reuther and M. Fink and G. Grueztner and Jouni Ahopelto and Tomi Haatainen and C. Mayer",

year = "2002",

language = "English",

pages = "91--92",

booktitle = "Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002",

publisher = "Naval Research Laboratory",

address = "United States",

note = "1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , NNT 2002 ; Conference date: 11-12-2002 Through 13-12-2002",

url = "http://www.nntconf.org/pdf/2002ProgramSchedule.pdf",

}

Carlberg, P, Graczyk, M, Sarwe, EL, Maximov, I, Beck, M, Montelius, L, Sotomayor Torres, CM, Cardinaud, CH, Pfeiffer, K, Reuther, F, Fink, M, Grueztner, G, Ahopelto, J , Haatainen, T & Mayer, C 2002, Lift-Off process for nanoimprint lithography. in Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. Naval Research Laboratory, San Francisco, pp. 91-92, 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02 , San Francisco, United States, 11/12/02.

Lift-Off process for nanoimprint lithography. / Carlberg, P.; Graczyk, M.; Sarwe, E.L. et al.
Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002. San Francisco: Naval Research Laboratory, 2002. p. 91-92.

Research output: Chapter in Book/Report/Conference proceeding › Conference abstract in proceedings › Scientific

TY - CHAP

T1 - Lift-Off process for nanoimprint lithography

AU - Carlberg, P.

AU - Graczyk, M.

AU - Sarwe, E.L.

AU - Maximov, I.

AU - Beck, M.

AU - Montelius, L.

AU - Sotomayor Torres, C.M.

AU - Cardinaud, C.H.

AU - Pfeiffer, K.

AU - Reuther, F.

AU - Fink, M.

AU - Grueztner, G.

AU - Ahopelto, Jouni

AU - Haatainen, Tomi

AU - Mayer, C.

PY - 2002

Y1 - 2002

KW - Nanoimprint Lithography

M3 - Conference abstract in proceedings

SP - 91

EP - 92

BT - Proceedings of the First International Conference on Nanoimprint Nanoprint Technology, NNT Conference,San Francisco, CA, 11-13 Dec,2002

PB - Naval Research Laboratory

CY - San Francisco

T2 - 1st International Conference on Nanoimprint and Nanoprint Technology, NNT'02

Y2 - 11 December 2002 through 13 December 2002

ER -