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Linear and traceable scales for nanometrology: Dissertation
Jeremias Seppä
Research output
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Thesis
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Dissertation
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Keyphrases
Nanometrology
100%
Laser Interferometry
100%
Scanning White Light Interferometry
66%
Laser Interferometer
66%
Laser Diffractometer
66%
Grating
66%
Capacitive Sensor
66%
Periodic Error
66%
Computational Model
33%
Transfer Standard
33%
Measure Data
33%
MIKES
33%
Metrology
33%
Oscillation
33%
Scanning Electron Microscope
33%
Diffraction Angle
33%
Rotary Table
33%
Picometer
33%
Accreditation
33%
Sensor Angle
33%
Heterodyne Laser Interferometer
33%
Corrective
33%
Series Type
33%
Baltic Region
33%
Linear Equations
33%
Nonlinear Error
33%
X-ray Interferometer
33%
Range Uncertainty
33%
Interferometry
33%
Periodic Nonlinearity
33%
Vertical Scaling
33%
Research Laboratories
33%
University of Helsinki
33%
Moving Mirrors
33%
Error Correction
33%
Diffractometry
33%
Symmetric Differentials
33%
Force Microscope
33%
Fourier Series
33%
Linearization
33%
International Units
33%
INIS
lasers
100%
interferometry
85%
periodicity
57%
interferometers
57%
errors
42%
sensors
28%
range
28%
gratings
28%
diffractometers
28%
comparative evaluations
14%
data
14%
applications
14%
x radiation
14%
interfaces
14%
tables
14%
implementation
14%
scanning electron microscopy
14%
equations
14%
nonlinear problems
14%
units
14%
calibration
14%
laboratories
14%
metrology
14%
universities
14%
symmetry
14%
corrections
14%
mirrors
14%
diffraction
14%
microscopes
14%
oscillations
14%
Engineering
Nanometrology
100%
Interferometry
100%
Laser Interferometer
50%
Capacitive
33%
Measurement Data
16%
Rotary Table
16%
Accreditation
16%
Fourier Series
16%
Research Laboratories
16%
Nonlinearity
16%
Scanning Electron Microscope
16%
Linear Equation
16%
Physics
Laser Interferometry
100%
Optical Interferometry
66%
Diffractometers
66%
X Ray
33%
Computational Modeling
33%
Interferometry
33%
Electron Microscope
33%