Loaded series resonators for adjusting frequency response of acoustic wave resonators

Tapani Makkonen (Inventor), Markku Ylilammi (Inventor), Tuomas Pensala (Inventor), James Dekker (Inventor)

    Research output: PatentPatent

    Abstract

    An acoustic wave filter device is disclosed. The device includes an acoustic wave filter element, and a first resonator and a second resonator coupled to the acoustic wave filter element. The acoustic wave filter element includes interdigited input electrodes and output electrodes located on a top surface of a piezoelectric layer. Each of the first and the second resonators includes a top electrode on the top surface, and a bottom electrode on the bottom surface of the piezoelectric layer. At least one of each of the first and the second resonators' electrodes is electrically connected to the acoustic wave filter element. The first resonator has a first notch in resonator impedance at a first frequency. The second resonator includes a first mass loading layer on the second resonator electrode such that the second resonator has a second notch in resonator impedance at a second frequency different from the first frequency.

    Patent family as of 29.12.2021
    US11088670 BB 20210810 US20190567749 20190911      
    US2021075392 AA 20210311 US20190567749 20190911      
    US2021359659 AA 20211118 US20210379304 20210719      
    WO21048080 A1 20210318 WO2020EP75001 20200908

    Link to current patent family on right 

    Original languageEnglish
    Patent numberUS2021075392
    IPCH03H 9/ 60 A I
    Priority date11/09/19
    Publication statusPublished - 11 Mar 2021
    MoE publication typeH1 Granted patent

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