| Original language | English |
|---|---|
| Title of host publication | Symposium on Micromachining and Microfabrication VI, MF00 |
| Subtitle of host publication | Santa Clara, CA, US, 18-20 September 2000 |
| Publisher | International Society for Optics and Photonics SPIE |
| Pages | 90-97 |
| ISBN (Print) | 0-8194-3830-8 |
| Publication status | Published - 2000 |
| MoE publication type | A4 Article in a conference publication |
Publication series
| Series | Proceedings of SPIE |
|---|---|
| Volume | 4174 |
| ISSN | 0277-786X |