Loading effects in deep silicon etching

Jani Karttunen, Jyrki Kiihamäki, Sami Franssila

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    81 Citations (Scopus)
    Original languageEnglish
    Title of host publicationSymposium on Micromachining and Microfabrication VI, MF00
    Subtitle of host publicationSanta Clara, CA, US, 18-20 September 2000
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)0-8194-3830-8
    Publication statusPublished - 2000
    MoE publication typeA4 Article in a conference publication

    Publication series

    SeriesProceedings of SPIE

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