The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.
|Pages (from-to)||23 - 27|
|Number of pages||5|
|Journal||Sensors and Actuators A: Physical|
|Publication status||Published - 2004|
|MoE publication type||A1 Journal article-refereed|
- micromechanical oscillators