Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori (Corresponding Author), Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, Aarne Oja, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

37 Citations (Scopus)

Abstract

The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.
Original languageEnglish
Pages (from-to)23 - 27
Number of pages5
JournalSensors and Actuators A: Physical
Volume115
Issue number1
DOIs
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed

Fingerprint

Silicon
Single crystals
single crystals
silicon
humidity
Resonators
Atmospheric humidity
contamination
Contamination
Aging of materials
resonators
Vacuum
vacuum
Water
water

Keywords

  • micromechanical oscillators

Cite this

Koskenvuori, Mika ; Mattila, Tomi ; Häärä, Ari ; Kiihamäki, Jyrki ; Tittonen, Ilkka ; Oja, Aarne ; Seppä, Heikki. / Long-term stability of single-crystal silicon microresonators. In: Sensors and Actuators A: Physical. 2004 ; Vol. 115, No. 1. pp. 23 - 27.
@article{a793edf2d2644bf4b21f1b325be78f25,
title = "Long-term stability of single-crystal silicon microresonators",
abstract = "The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.",
keywords = "micromechanical oscillators",
author = "Mika Koskenvuori and Tomi Mattila and Ari H{\"a}{\"a}r{\"a} and Jyrki Kiiham{\"a}ki and Ilkka Tittonen and Aarne Oja and Heikki Sepp{\"a}",
year = "2004",
doi = "10.1016/j.sna.2004.03.013",
language = "English",
volume = "115",
pages = "23 -- 27",
journal = "Sensors and Actuators A: Physical",
issn = "0924-4247",
publisher = "Elsevier",
number = "1",

}

Long-term stability of single-crystal silicon microresonators. / Koskenvuori, Mika (Corresponding Author); Mattila, Tomi; Häärä, Ari; Kiihamäki, Jyrki; Tittonen, Ilkka; Oja, Aarne; Seppä, Heikki.

In: Sensors and Actuators A: Physical, Vol. 115, No. 1, 2004, p. 23 - 27.

Research output: Contribution to journalArticleScientificpeer-review

TY - JOUR

T1 - Long-term stability of single-crystal silicon microresonators

AU - Koskenvuori, Mika

AU - Mattila, Tomi

AU - Häärä, Ari

AU - Kiihamäki, Jyrki

AU - Tittonen, Ilkka

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.

AB - The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.

KW - micromechanical oscillators

U2 - 10.1016/j.sna.2004.03.013

DO - 10.1016/j.sna.2004.03.013

M3 - Article

VL - 115

SP - 23

EP - 27

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

SN - 0924-4247

IS - 1

ER -