Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori (Corresponding Author), Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, Aarne Oja, Heikki Seppä

Research output: Contribution to journalArticleScientificpeer-review

37 Citations (Scopus)


The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.
Original languageEnglish
Pages (from-to)23 - 27
Number of pages5
JournalSensors and Actuators A: Physical
Issue number1
Publication statusPublished - 2004
MoE publication typeA1 Journal article-refereed


  • micromechanical oscillators

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