Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori (Corresponding Author), Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, Aarne Oja, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    37 Citations (Scopus)

    Abstract

    The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.
    Original languageEnglish
    Pages (from-to)23 - 27
    Number of pages5
    JournalSensors and Actuators A: Physical
    Volume115
    Issue number1
    DOIs
    Publication statusPublished - 2004
    MoE publication typeA1 Journal article-refereed

    Keywords

    • micromechanical oscillators

    Fingerprint

    Dive into the research topics of 'Long-term stability of single-crystal silicon microresonators'. Together they form a unique fingerprint.

    Cite this