Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori; Tomi Mattila; Ari Häärä; Jyrki Kiihamäki; Ilkka Tittonen; Aarne Oja; Heikki Seppä

doi:10.1016/j.sna.2004.03.013

Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori^*, Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, Aarne Oja, Heikki Seppä

^*Corresponding author for this work

Research output: Contribution to journal › Article › Scientific › peer-review

40 Citations (Scopus)

Abstract

The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (f_r∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.

Original language	English
Pages (from-to)	23-27
Journal	Sensors and Actuators A: Physical
Volume	115
Issue number	1
DOIs	https://doi.org/10.1016/j.sna.2004.03.013
Publication status	Published - 2004
MoE publication type	A1 Journal article-refereed

Keywords

micromechanical oscillators

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.sna.2004.03.013

Cite this

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title = "Long-term stability of single-crystal silicon microresonators",

abstract = "The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.",

keywords = "micromechanical oscillators",

author = "Mika Koskenvuori and Tomi Mattila and Ari H{\"a}{\"a}r{\"a} and Jyrki Kiiham{\"a}ki and Ilkka Tittonen and Aarne Oja and Heikki Sepp{\"a}",

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language = "English",

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AU - Koskenvuori, Mika

AU - Mattila, Tomi

AU - Häärä, Ari

AU - Kiihamäki, Jyrki

AU - Tittonen, Ilkka

AU - Oja, Aarne

AU - Seppä, Heikki

PY - 2004

Y1 - 2004

N2 - The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.

AB - The long-term stability of single-crystal silicon microresonators is evaluated. The vacuum-encapsulated length-extensional mode resonators (fr∼13 MHz) are demonstrated to be capable of a ppm-level aging rate for a follow-up period of 42 days. Comparison with unsealed devices reveals that the silicon microresonators are sensitive to water contamination from the ambient humidity.

KW - micromechanical oscillators

U2 - 10.1016/j.sna.2004.03.013

DO - 10.1016/j.sna.2004.03.013

M3 - Article

SN - 0924-4247

VL - 115

SP - 23

EP - 27

JO - Sensors and Actuators A: Physical

JF - Sensors and Actuators A: Physical

IS - 1

ER -

Long-term stability of single-crystal silicon microresonators

Abstract

Keywords

UN SDGs

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