Long-term stability of single-crystal silicon microresonators

Mika Koskenvuori (Corresponding Author), Tomi Mattila, Ari Häärä, Jyrki Kiihamäki, Ilkka Tittonen, Aarne Oja, Heikki Seppä

    Research output: Contribution to journalArticleScientificpeer-review

    39 Citations (Scopus)

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