Low loss acoustic device

Tuomas Pensala (Inventor), Tapani Makkonen (Inventor)

    Research output: PatentPatent


    Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an acoustic wave resonator. The bi-electric reflector is above the substrate and includes a first layer that has a first acoustic impedance, and a second layer that has a second acoustic impedance lower than the first acoustic impedance. The first layer has a first surface that includes a floating region that provides a ceiling of a cavity. The second layer is on top of the floating region of the first layer. The acoustic wave resonator is on top of the second layer of the bi-layer reflector. The acoustic wave resonator includes a piezoelectric layer, an electrode and a counter-electrode such that application of a radio frequency voltage between the electrode and the counter-electrode creates acoustic resonance waves in the piezoelectric layer.

    Patent family as of 30.12.2021
    CN113474993 A 20211001 CN202080013122 20200207      
    EP3921939 A1 20211215 EP20200718555 20200207      
    US11146241 BB 20211012 US20190271398 20190208      
    US2020259480 AA 20200813 US20190271398 20190208      
    WO20161283 A1 20200813 WO2020EP53091 20200207

    Link to current patent family on right 

    Original languageEnglish
    Patent numberUS2020259480
    IPCH03H 9/ 54 A I
    Priority date8/02/19
    Publication statusPublished - 13 Aug 2020
    MoE publication typeH1 Granted patent


    Dive into the research topics of 'Low loss acoustic device'. Together they form a unique fingerprint.

    Cite this