Low loss acoustic device

Tuomas Pensala; Tapani Makkonen

Low loss acoustic device

Tuomas Pensala (Inventor)
, Tapani Makkonen (Inventor)

Research output: Patent › Patent

Abstract

Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an acoustic wave resonator. The bi-electric reflector is above the substrate and includes a first layer that has a first acoustic impedance, and a second layer that has a second acoustic impedance lower than the first acoustic impedance. The first layer has a first surface that includes a floating region that provides a ceiling of a cavity. The second layer is on top of the floating region of the first layer. The acoustic wave resonator is on top of the second layer of the bi-layer reflector. The acoustic wave resonator includes a piezoelectric layer, an electrode and a counter-electrode such that application of a radio frequency voltage between the electrode and the counter-electrode creates acoustic resonance waves in the piezoelectric layer.

Patent family as of 30.12.2021
CN113474993 A 20211001 CN202080013122 20200207
EP3921939 A1 20211215 EP20200718555 20200207
US11146241 BB 20211012 US20190271398 20190208
US2020259480 AA 20200813 US20190271398 20190208
WO20161283 A1 20200813 WO2020EP53091 20200207

Link to current patent family on right

Original language	English
Patent number	US2020259480
IPC	H03H 9/ 54 A I
Priority date	8/02/19
Publication status	Published - 13 Aug 2020
MoE publication type	H1 Granted patent

Cite this

@misc{98ef71798cf6415bb9a87aafcc0409b6,

title = "Low loss acoustic device",

abstract = "Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an acoustic wave resonator. The bi-electric reflector is above the substrate and includes a first layer that has a first acoustic impedance, and a second layer that has a second acoustic impedance lower than the first acoustic impedance. The first layer has a first surface that includes a floating region that provides a ceiling of a cavity. The second layer is on top of the floating region of the first layer. The acoustic wave resonator is on top of the second layer of the bi-layer reflector. The acoustic wave resonator includes a piezoelectric layer, an electrode and a counter-electrode such that application of a radio frequency voltage between the electrode and the counter-electrode creates acoustic resonance waves in the piezoelectric layer. Patent family as of 30.12.2021 CN113474993 A 20211001 CN202080013122 20200207 EP3921939 A1 20211215 EP20200718555 20200207 US11146241 BB 20211012 US20190271398 20190208 US2020259480 AA 20200813 US20190271398 20190208 WO20161283 A1 20200813 WO2020EP53091 20200207 Link to current patent family on right ",

author = "Tuomas Pensala and Tapani Makkonen",

year = "2020",

month = aug,

day = "13",

language = "English",

type = "Patent",

note = "US2020259480; H03H 9/ 54 A I",

}

TY - PAT

T1 - Low loss acoustic device

AU - Pensala, Tuomas

AU - Makkonen, Tapani

PY - 2020/8/13

Y1 - 2020/8/13

N2 - Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an acoustic wave resonator. The bi-electric reflector is above the substrate and includes a first layer that has a first acoustic impedance, and a second layer that has a second acoustic impedance lower than the first acoustic impedance. The first layer has a first surface that includes a floating region that provides a ceiling of a cavity. The second layer is on top of the floating region of the first layer. The acoustic wave resonator is on top of the second layer of the bi-layer reflector. The acoustic wave resonator includes a piezoelectric layer, an electrode and a counter-electrode such that application of a radio frequency voltage between the electrode and the counter-electrode creates acoustic resonance waves in the piezoelectric layer. Patent family as of 30.12.2021 CN113474993 A 20211001 CN202080013122 20200207 EP3921939 A1 20211215 EP20200718555 20200207 US11146241 BB 20211012 US20190271398 20190208 US2020259480 AA 20200813 US20190271398 20190208 WO20161283 A1 20200813 WO2020EP53091 20200207 Link to current patent family on right

AB - Acoustic wave devices are disclosed. The devices include a substrate, a bi-layer reflector and an acoustic wave resonator. The bi-electric reflector is above the substrate and includes a first layer that has a first acoustic impedance, and a second layer that has a second acoustic impedance lower than the first acoustic impedance. The first layer has a first surface that includes a floating region that provides a ceiling of a cavity. The second layer is on top of the floating region of the first layer. The acoustic wave resonator is on top of the second layer of the bi-layer reflector. The acoustic wave resonator includes a piezoelectric layer, an electrode and a counter-electrode such that application of a radio frequency voltage between the electrode and the counter-electrode creates acoustic resonance waves in the piezoelectric layer. Patent family as of 30.12.2021 CN113474993 A 20211001 CN202080013122 20200207 EP3921939 A1 20211215 EP20200718555 20200207 US11146241 BB 20211012 US20190271398 20190208 US2020259480 AA 20200813 US20190271398 20190208 WO20161283 A1 20200813 WO2020EP53091 20200207 Link to current patent family on right

UR - https://worldwide.espacenet.com/patent/search/family/070285604/publication/US11146241B2?q=US11146241

M3 - Patent

M1 - US2020259480

ER -

Low loss acoustic device

Abstract

Other files and links

Fingerprint

Cite this