Low-Loss Converters between Optical Silicon Waveguides of Different Sizes and Types

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Abstract

Two types of low-loss converters between different optical waveguides on silicon-on-insulator are demonstrated. A vertical taper between 9.4- and 3.8-μm-thick single-moded rib waveguides gives an excess loss of 0.7/spl plusmn/0.2 dB with negligible polarization dependency. The second structure converts a 9.7-μm-thick rib waveguide into an equally thick and highly multimoded strip waveguide with a negligible loss (<0.07 dB) for the fundamental mode. The fabrication of both structures is based on a simple two-step etch process with a relaxed mask alignment tolerance and no need for epitaxy.
Original languageEnglish
Pages (from-to)709-711
JournalIEEE Photonics Technology Letters
Volume18
Issue number5
DOIs
Publication statusPublished - 2006
MoE publication typeA1 Journal article-refereed

Keywords

  • adiabatic conversion
  • integrated optics
  • multistep
  • patterning
  • silicon microphotonics
  • silicon waveguide
  • silicon-oninsulator
  • (SOI) technology
  • vertical taper

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