Low-loss delay lines with small footprint on a micron-scale SOI platform

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    1 Citation (Scopus)

    Abstract

    Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.
    Original languageEnglish
    Title of host publicationSilicon Photonics X
    EditorsGraham T. Reed, Michael R. Watts
    PublisherInternational Society for Optics and Photonics SPIE
    ISBN (Print)978-1-6284-1457-8
    DOIs
    Publication statusPublished - 27 Feb 2015
    MoE publication typeA4 Article in a conference publication
    EventSilicon Photonics X - San Francisco, United States
    Duration: 9 Feb 201512 Feb 2015

    Publication series

    SeriesProceedings of SPIE
    Volume9367
    ISSN0277-786X

    Conference

    ConferenceSilicon Photonics X
    Abbreviated titleSPIE OPTO
    CountryUnited States
    CitySan Francisco
    Period9/02/1512/02/15

    Fingerprint

    SOI (semiconductors)
    footprints
    delay lines
    platforms
    waveguides
    strip
    interferometers
    phase shift keying
    demodulation
    silicon
    bit error rate
    Q factors
    extinction
    diagrams
    wafers
    broadband
    radii
    propagation

    Keywords

    • delay lines
    • delayed interferometers
    • DPSK demodulation
    • integrated optics
    • photonic integrated circuits
    • silicon photonics
    • spiral waveguides

    Cite this

    Cherchi, M., Harjanne, M., Vyrsokinos, K., Ylinen, S., Kapulainen, M., Vehmas, T., & Aalto, T. (2015). Low-loss delay lines with small footprint on a micron-scale SOI platform. In G. T. Reed, & M. R. Watts (Eds.), Silicon Photonics X [93670A] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9367 https://doi.org/10.1117/12.2079560
    Cherchi, Matteo ; Harjanne, Mikko ; Vyrsokinos, Konstantinos ; Ylinen, Sami ; Kapulainen, Markku ; Vehmas, Tapani ; Aalto, Timo. / Low-loss delay lines with small footprint on a micron-scale SOI platform. Silicon Photonics X . editor / Graham T. Reed ; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9367).
    @inproceedings{788176d8d0ea4455bd814b7d0ef43741,
    title = "Low-loss delay lines with small footprint on a micron-scale SOI platform",
    abstract = "Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.",
    keywords = "delay lines, delayed interferometers, DPSK demodulation, integrated optics, photonic integrated circuits, silicon photonics, spiral waveguides",
    author = "Matteo Cherchi and Mikko Harjanne and Konstantinos Vyrsokinos and Sami Ylinen and Markku Kapulainen and Tapani Vehmas and Timo Aalto",
    year = "2015",
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    series = "Proceedings of SPIE",
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    Cherchi, M, Harjanne, M, Vyrsokinos, K, Ylinen, S, Kapulainen, M, Vehmas, T & Aalto, T 2015, Low-loss delay lines with small footprint on a micron-scale SOI platform. in GT Reed & MR Watts (eds), Silicon Photonics X ., 93670A, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9367, Silicon Photonics X, San Francisco, United States, 9/02/15. https://doi.org/10.1117/12.2079560

    Low-loss delay lines with small footprint on a micron-scale SOI platform. / Cherchi, Matteo; Harjanne, Mikko; Vyrsokinos, Konstantinos; Ylinen, Sami; Kapulainen, Markku; Vehmas, Tapani; Aalto, Timo.

    Silicon Photonics X . ed. / Graham T. Reed; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. 93670A (Proceedings of SPIE, Vol. 9367).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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    T1 - Low-loss delay lines with small footprint on a micron-scale SOI platform

    AU - Cherchi, Matteo

    AU - Harjanne, Mikko

    AU - Vyrsokinos, Konstantinos

    AU - Ylinen, Sami

    AU - Kapulainen, Markku

    AU - Vehmas, Tapani

    AU - Aalto, Timo

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    N2 - Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.

    AB - Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.

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    KW - photonic integrated circuits

    KW - silicon photonics

    KW - spiral waveguides

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    SN - 978-1-6284-1457-8

    T3 - Proceedings of SPIE

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    A2 - Reed, Graham T.

    A2 - Watts, Michael R.

    PB - International Society for Optics and Photonics SPIE

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    Cherchi M, Harjanne M, Vyrsokinos K, Ylinen S, Kapulainen M, Vehmas T et al. Low-loss delay lines with small footprint on a micron-scale SOI platform. In Reed GT, Watts MR, editors, Silicon Photonics X . International Society for Optics and Photonics SPIE. 2015. 93670A. (Proceedings of SPIE, Vol. 9367). https://doi.org/10.1117/12.2079560