Low-loss delay lines with small footprint on a micron-scale SOI platform

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

1 Citation (Scopus)

Abstract

Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.
Original languageEnglish
Title of host publicationSilicon Photonics X
EditorsGraham T. Reed, Michael R. Watts
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-1-6284-1457-8
DOIs
Publication statusPublished - 27 Feb 2015
MoE publication typeA4 Article in a conference publication
EventSilicon Photonics X - San Francisco, United States
Duration: 9 Feb 201512 Feb 2015

Publication series

NameProceedings of SPIE
PublisherSPIE
Volume9367
ISSN (Print)0277-786X

Conference

ConferenceSilicon Photonics X
Abbreviated titleSPIE OPTO
CountryUnited States
CitySan Francisco
Period9/02/1512/02/15

Fingerprint

SOI (semiconductors)
footprints
delay lines
platforms
waveguides
strip
interferometers
phase shift keying
demodulation
silicon
bit error rate
Q factors
extinction
diagrams
wafers
broadband
radii
propagation

Keywords

  • delay lines
  • delayed interferometers
  • DPSK demodulation
  • integrated optics
  • photonic integrated circuits
  • silicon photonics
  • spiral waveguides

Cite this

Cherchi, M., Harjanne, M., Vyrsokinos, K., Ylinen, S., Kapulainen, M., Vehmas, T., & Aalto, T. (2015). Low-loss delay lines with small footprint on a micron-scale SOI platform. In G. T. Reed, & M. R. Watts (Eds.), Silicon Photonics X [93670A] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 9367 https://doi.org/10.1117/12.2079560
Cherchi, Matteo ; Harjanne, Mikko ; Vyrsokinos, Konstantinos ; Ylinen, Sami ; Kapulainen, Markku ; Vehmas, Tapani ; Aalto, Timo. / Low-loss delay lines with small footprint on a micron-scale SOI platform. Silicon Photonics X . editor / Graham T. Reed ; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. (Proceedings of SPIE, Vol. 9367).
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abstract = "Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.",
keywords = "delay lines, delayed interferometers, DPSK demodulation, integrated optics, photonic integrated circuits, silicon photonics, spiral waveguides",
author = "Matteo Cherchi and Mikko Harjanne and Konstantinos Vyrsokinos and Sami Ylinen and Markku Kapulainen and Tapani Vehmas and Timo Aalto",
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Cherchi, M, Harjanne, M, Vyrsokinos, K, Ylinen, S, Kapulainen, M, Vehmas, T & Aalto, T 2015, Low-loss delay lines with small footprint on a micron-scale SOI platform. in GT Reed & MR Watts (eds), Silicon Photonics X ., 93670A, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 9367, Silicon Photonics X, San Francisco, United States, 9/02/15. https://doi.org/10.1117/12.2079560

Low-loss delay lines with small footprint on a micron-scale SOI platform. / Cherchi, Matteo; Harjanne, Mikko; Vyrsokinos, Konstantinos; Ylinen, Sami; Kapulainen, Markku; Vehmas, Tapani; Aalto, Timo.

Silicon Photonics X . ed. / Graham T. Reed; Michael R. Watts. International Society for Optics and Photonics SPIE, 2015. 93670A (Proceedings of SPIE, Vol. 9367).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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T1 - Low-loss delay lines with small footprint on a micron-scale SOI platform

AU - Cherchi, Matteo

AU - Harjanne, Mikko

AU - Vyrsokinos, Konstantinos

AU - Ylinen, Sami

AU - Kapulainen, Markku

AU - Vehmas, Tapani

AU - Aalto, Timo

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N2 - Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.

AB - Long and yet compact spiral waveguides based on micron-scale silicon strip waveguides has been enabled very recently by the introduction of the Euler bends. By ensuring effective broadband single mode operation of otherwise highly multimodal waveguides, these bends can have very low losses (<0.01 dB/90°) even with effective radii of a few microns. Together with the low propagation losses (< 0.15 dB/cm) of micron-scale strip waveguides, these bends enable centimeter-long delay lines with negligible losses and very small foot-print (< 1 mm2). In particular, interferometers delayed by ≈ 1 cm long spirals on one of the two arms have been fabricated on SOI wafers with both 3 um- and 4 umthick silicon layer, based on the well assessed process developed by VTT. The full devices have footprint smaller than 1.5 mm2, and they have been measured to have extinction ratios < 15 dB (reaching up to 21 dB) and about 3 dB excess losses. Functional characterization of the delayed interferometers at about 10 Gbps through demodulation of pseudorandom Differential Phase Shift Keying signals led to clearly opened eye diagrams with Q factor of 8.6 and bit error rates lower than 10-15.

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KW - DPSK demodulation

KW - integrated optics

KW - photonic integrated circuits

KW - silicon photonics

KW - spiral waveguides

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DO - 10.1117/12.2079560

M3 - Conference article in proceedings

SN - 978-1-6284-1457-8

T3 - Proceedings of SPIE

BT - Silicon Photonics X

A2 - Reed, Graham T.

A2 - Watts, Michael R.

PB - International Society for Optics and Photonics SPIE

ER -

Cherchi M, Harjanne M, Vyrsokinos K, Ylinen S, Kapulainen M, Vehmas T et al. Low-loss delay lines with small footprint on a micron-scale SOI platform. In Reed GT, Watts MR, editors, Silicon Photonics X . International Society for Optics and Photonics SPIE. 2015. 93670A. (Proceedings of SPIE, Vol. 9367). https://doi.org/10.1117/12.2079560