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Low-loss multiple-slot waveguides fabricated by optical lithography and atomic layer deposition
L. Karvonen, A. Säynätjoki, Y. Chen, X. Tu, T.-Y. Liow, Jussi Hiltunen, Marianne Hiltunen, G.-Q. Lo, S. Honkanen
Research output: Contribution to journal › Article › Scientific › peer-review
14
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(Scopus)