Low-loss silicon slot waveguides and couplers fabricated with optical lithography and atomic layer deposition

Antti Säynätjoki (Corresponding Author), Lasse Karvonen, Tapani Alasaarela, X Tu, T. Y. Liow, Marianne Hiltunen, Ari Tervonen, G. Q. Lo, Seppo Honkanen

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    Physics