Low noise, low power micromechanical oscillator

Pekka Rantakari, Ville Kaajakari, Tomi Mattila, Jyrki Kiihamäki, Aarne Oja, Ilkka Tittonen, Heikki Seppä

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

15 Citations (Scopus)
Original languageEnglish
Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages2135-2138
ISBN (Electronic)0-7803-8995-6
ISBN (Print)0-7803-8994-8
DOIs
Publication statusPublished - 2005
MoE publication typeA4 Article in a conference publication
Event13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
Duration: 5 Jun 20059 Jun 2005

Conference

Conference13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated titleTRANSDUCERS '05
CountryKorea, Republic of
CitySeoul
Period5/06/059/06/05

Cite this

Rantakari, P., Kaajakari, V., Mattila, T., Kiihamäki, J., Oja, A., Tittonen, I., & Seppä, H. (2005). Low noise, low power micromechanical oscillator. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 (pp. 2135-2138). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/SENSOR.2005.1497526