@inproceedings{de2882e9d0f34fde853a8ae11840fcdf,
title = "Low noise, low power micromechanical oscillator",
author = "Pekka Rantakari and Ville Kaajakari and Tomi Mattila and Jyrki Kiiham{\"a}ki and Aarne Oja and Ilkka Tittonen and Heikki Sepp{\"a}",
year = "2005",
doi = "10.1109/SENSOR.2005.1497526",
language = "English",
isbn = "0-7803-8994-8",
pages = "2135--2138",
booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",
publisher = "IEEE Institute of Electrical and Electronic Engineers",
address = "United States",
note = "13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",
}