Low noise, low power micromechanical oscillator

Pekka Rantakari, Ville Kaajakari, Tomi Mattila, Jyrki Kiihamäki, Aarne Oja, Ilkka Tittonen, Heikki Seppä

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    17 Citations (Scopus)

    Abstract

    A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.
    Original languageEnglish
    Title of host publicationThe 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
    PublisherIEEE Institute of Electrical and Electronic Engineers
    Pages2135-2138
    ISBN (Electronic)978-0-7803-8995-3
    ISBN (Print)978-0-7803-8994-6
    DOIs
    Publication statusPublished - 2005
    MoE publication typeA4 Article in a conference publication
    Event13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
    Duration: 5 Jun 20059 Jun 2005

    Conference

    Conference13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
    Abbreviated titleTRANSDUCERS '05
    Country/TerritoryKorea, Republic of
    CitySeoul
    Period5/06/059/06/05

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