Abstract
A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.
Original language | English |
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Title of host publication | The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 |
Publisher | IEEE Institute of Electrical and Electronic Engineers |
Pages | 2135-2138 |
ISBN (Electronic) | 978-0-7803-8995-3 |
ISBN (Print) | 978-0-7803-8994-6 |
DOIs | |
Publication status | Published - 2005 |
MoE publication type | A4 Article in a conference publication |
Event | 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005 |
Conference
Conference | 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 |
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Abbreviated title | TRANSDUCERS '05 |
Country/Territory | Korea, Republic of |
City | Seoul |
Period | 5/06/05 → 9/06/05 |