Low noise, low power micromechanical oscillator

Pekka Rantakari; Ville Kaajakari; Tomi Mattila; Jyrki Kiihamäki; Aarne Oja; Ilkka Tittonen; Heikki Seppä

doi:10.1109/SENSOR.2005.1497526

Low noise, low power micromechanical oscillator

Pekka Rantakari, Ville Kaajakari, Tomi Mattila, Jyrki Kiihamäki, Aarne Oja, Ilkka Tittonen, Heikki Seppä

Helsinki University of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

18 Citations (Scopus)

Abstract

A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.

Original language	English
Title of host publication	The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	2135-2138
ISBN (Electronic)	978-0-7803-8995-3
ISBN (Print)	978-0-7803-8994-6
DOIs	https://doi.org/10.1109/SENSOR.2005.1497526
Publication status	Published - 2005
MoE publication type	A4 Article in a conference publication
Event	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of Duration: 5 Jun 2005 → 9 Jun 2005

Conference

Conference	13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05
Abbreviated title	TRANSDUCERS '05
Country/Territory	Korea, Republic of
City	Seoul
Period	5/06/05 → 9/06/05

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10.1109/SENSOR.2005.1497526

Cite this

Rantakari, P., Kaajakari, V., Mattila, T., Kiihamäki, J., Oja, A., Tittonen, I., & Seppä, H. (2005). Low noise, low power micromechanical oscillator. In The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05 (pp. 2135-2138). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/SENSOR.2005.1497526

@inproceedings{de2882e9d0f34fde853a8ae11840fcdf,

title = "Low noise, low power micromechanical oscillator",

abstract = "A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.",

author = "Pekka Rantakari and Ville Kaajakari and Tomi Mattila and Jyrki Kiiham{\"a}ki and Aarne Oja and Ilkka Tittonen and Heikki Sepp{\"a}",

year = "2005",

doi = "10.1109/SENSOR.2005.1497526",

language = "English",

isbn = "978-0-7803-8994-6",

pages = "2135--2138",

booktitle = "The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

note = "13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, TRANSDUCERS '05 ; Conference date: 05-06-2005 Through 09-06-2005",

}

Rantakari, P, Kaajakari, V, Mattila, T , Kiihamäki, J, Oja, A, Tittonen, I & Seppä, H 2005, Low noise, low power micromechanical oscillator. in The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, pp. 2135-2138, 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 5/06/05. https://doi.org/10.1109/SENSOR.2005.1497526

Low noise, low power micromechanical oscillator. / Rantakari, Pekka; Kaajakari, Ville; Mattila, Tomi et al.
The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05. IEEE Institute of Electrical and Electronic Engineers, 2005. p. 2135-2138.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Low noise, low power micromechanical oscillator

AU - Rantakari, Pekka

AU - Kaajakari, Ville

AU - Mattila, Tomi

AU - Kiihamäki, Jyrki

AU - Oja, Aarne

AU - Tittonen, Ilkka

AU - Seppä, Heikki

PY - 2005

Y1 - 2005

N2 - A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.

AB - A 180-nm gap micromechanical resonator biased at 20 V and full custom integrated electronics are used to implement a 13-MHz oscillator that has noise floor of -147 dBc/Hz and power consumption of 240 /spl mu/W including both the loop amplifier and the buffer to a 10-pF load. The design of Pierce type MEMS oscillator is discussed in terms of noise, power, and oscillator stability.

U2 - 10.1109/SENSOR.2005.1497526

DO - 10.1109/SENSOR.2005.1497526

M3 - Conference article in proceedings

SN - 978-0-7803-8994-6

SP - 2135

EP - 2138

BT - The 13th International Conference on Solid-State Sensors, Actuators and Microsystems. TRANSDUCERS '05

PB - IEEE Institute of Electrical and Electronic Engineers

T2 - 13th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS '05

Y2 - 5 June 2005 through 9 June 2005

ER -

Low noise, low power micromechanical oscillator

Abstract

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