Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen; A. Säynätjoki; X. Tu; T.Y. Liow; Marianne Hiltunen; Jussi Hiltunen; A. Tervonen; G.Q. Lo; S. Honkanen

doi:10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen, A. Säynätjoki, X. Tu, T.Y. Liow, Marianne Hiltunen, Jussi Hiltunen, A. Tervonen, G.Q. Lo, S. Honkanen

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

Abstract

We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides

Original language	English
Title of host publication	Proceedings of SPIE 8431
Subtitle of host publication	Silicon Photonics and Photonic Integrated Circuits III
Editors	Vivien Laurent
Publisher	International Society for Optics and Photonics SPIE
ISBN (Print)	978-0-8194-9123-7
DOIs	https://doi.org/10.1117/12.921805
Publication status	Published - 2012
MoE publication type	Not Eligible
Event	Silicon Photonics and Photonic Integrated Circuits III - Brussels, Belgium Duration: 16 Apr 2012 → 19 Apr 2012

Publication series

Series	Proceedings of SPIE
Volume	8431
ISSN	0277-786X

Conference

Conference	Silicon Photonics and Photonic Integrated Circuits III
Country/Territory	Belgium
City	Brussels
Period	16/04/12 → 19/04/12

Keywords

Atomic layer deposition
loss
nonlinearity
slot waveguide

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10.1117/12.921805

Cite this

Karvonen, L., Säynätjoki, A., Tu, X., Liow, T. Y., Hiltunen, M., Hiltunen, J., Tervonen, A., Lo, G. Q., & Honkanen, S. (2012). Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. In V. Laurent (Ed.), Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III Article 84311M International Society for Optics and Photonics SPIE. https://doi.org/10.1117/12.921805

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title = "Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films",

abstract = "We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides",

keywords = "Atomic layer deposition, loss, nonlinearity, slot waveguide",

author = "L. Karvonen and A. S{\"a}yn{\"a}tjoki and X. Tu and T.Y. Liow and Marianne Hiltunen and Jussi Hiltunen and A. Tervonen and G.Q. Lo and S. Honkanen",

year = "2012",

doi = "10.1117/12.921805",

language = "English",

isbn = "978-0-8194-9123-7",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

editor = "Vivien Laurent",

booktitle = "Proceedings of SPIE 8431",

address = "United States",

note = "Silicon Photonics and Photonic Integrated Circuits III ; Conference date: 16-04-2012 Through 19-04-2012",

}

Karvonen, L, Säynätjoki, A, Tu, X, Liow, TY, Hiltunen, M, Hiltunen, J, Tervonen, A, Lo, GQ & Honkanen, S 2012, Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. in V Laurent (ed.), Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III., 84311M, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8431, Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, 16/04/12. https://doi.org/10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. / Karvonen, L.; Säynätjoki, A.; Tu, X. et al.
Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. ed. / Vivien Laurent. International Society for Optics and Photonics SPIE, 2012. 84311M (Proceedings of SPIE, Vol. 8431).

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

AU - Karvonen, L.

AU - Säynätjoki, A.

AU - Tu, X.

AU - Liow, T.Y.

AU - Hiltunen, Marianne

AU - Hiltunen, Jussi

AU - Tervonen, A.

AU - Lo, G.Q.

AU - Honkanen, S.

PY - 2012

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N2 - We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides

AB - We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides

KW - Atomic layer deposition

KW - loss

KW - nonlinearity

KW - slot waveguide

U2 - 10.1117/12.921805

DO - 10.1117/12.921805

M3 - Conference article in proceedings

SN - 978-0-8194-9123-7

T3 - Proceedings of SPIE

BT - Proceedings of SPIE 8431

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PB - International Society for Optics and Photonics SPIE

T2 - Silicon Photonics and Photonic Integrated Circuits III

Y2 - 16 April 2012 through 19 April 2012

ER -

Karvonen L, Säynätjoki A, Tu X, Liow TY, Hiltunen M, Hiltunen J et al. Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. In Laurent V, editor, Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. International Society for Optics and Photonics SPIE. 2012. 84311M. (Proceedings of SPIE, Vol. 8431). doi: 10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

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