Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen, A. Säynätjoki, X. Tu, T.Y. Liow, Marianne Hiltunen, Jussi Hiltunen, A. Tervonen, G.Q. Lo, S. Honkanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

Abstract

We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides
Original languageEnglish
Title of host publicationProceedings of SPIE 8431
Subtitle of host publicationSilicon Photonics and Photonic Integrated Circuits III
EditorsVivien Laurent
PublisherInternational Society for Optics and Photonics SPIE
ISBN (Print)978-0-8194-9123-7
DOIs
Publication statusPublished - 2012
MoE publication typeNot Eligible
EventSilicon Photonics and Photonic Integrated Circuits III - Brussels, Belgium
Duration: 16 Apr 201219 Apr 2012

Publication series

SeriesProceedings of SPIE
Volume8431
ISSN0277-786X

Conference

ConferenceSilicon Photonics and Photonic Integrated Circuits III
CountryBelgium
CityBrussels
Period16/04/1219/04/12

Fingerprint

slots
nonlinearity
waveguides
silicon
thin films
plains
CMOS
oxides
propagation
geometry

Keywords

  • Atomic layer deposition
  • loss
  • nonlinearity
  • slot waveguide

Cite this

Karvonen, L., Säynätjoki, A., Tu, X., Liow, T. Y., Hiltunen, M., Hiltunen, J., ... Honkanen, S. (2012). Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. In V. Laurent (Ed.), Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III [84311M] International Society for Optics and Photonics SPIE. Proceedings of SPIE, Vol.. 8431 https://doi.org/10.1117/12.921805
Karvonen, L. ; Säynätjoki, A. ; Tu, X. ; Liow, T.Y. ; Hiltunen, Marianne ; Hiltunen, Jussi ; Tervonen, A. ; Lo, G.Q. ; Honkanen, S. / Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. editor / Vivien Laurent. International Society for Optics and Photonics SPIE, 2012. (Proceedings of SPIE, Vol. 8431).
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abstract = "We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides",
keywords = "Atomic layer deposition, loss, nonlinearity, slot waveguide",
author = "L. Karvonen and A. S{\"a}yn{\"a}tjoki and X. Tu and T.Y. Liow and Marianne Hiltunen and Jussi Hiltunen and A. Tervonen and G.Q. Lo and S. Honkanen",
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Karvonen, L, Säynätjoki, A, Tu, X, Liow, TY, Hiltunen, M, Hiltunen, J, Tervonen, A, Lo, GQ & Honkanen, S 2012, Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. in V Laurent (ed.), Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III., 84311M, International Society for Optics and Photonics SPIE, Proceedings of SPIE, vol. 8431, Silicon Photonics and Photonic Integrated Circuits III, Brussels, Belgium, 16/04/12. https://doi.org/10.1117/12.921805

Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. / Karvonen, L.; Säynätjoki, A.; Tu, X.; Liow, T.Y.; Hiltunen, Marianne; Hiltunen, Jussi; Tervonen, A.; Lo, G.Q.; Honkanen, S.

Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. ed. / Vivien Laurent. International Society for Optics and Photonics SPIE, 2012. 84311M (Proceedings of SPIE, Vol. 8431).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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N2 - We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides

AB - We demonstrate low-loss silicon slot waveguides filled with single and dual atomic layer deposited oxide layers. Propagation losses less than 5 dB/cm and 8 dB/cm are achieved for the waveguides with single (Al 2O 3) and double (Al 2O 3-TiO 2) layers, respectively. The devices are fabricated using low-temperature CMOS compatible processes. The geometries allow nonlinearities nearly two orders of magnitude smaller than plain silicon waveguides

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KW - loss

KW - nonlinearity

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Karvonen L, Säynätjoki A, Tu X, Liow TY, Hiltunen M, Hiltunen J et al. Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films. In Laurent V, editor, Proceedings of SPIE 8431: Silicon Photonics and Photonic Integrated Circuits III. International Society for Optics and Photonics SPIE. 2012. 84311M. (Proceedings of SPIE, Vol. 8431). https://doi.org/10.1117/12.921805