Low-nonlinearity and low-loss silicon slot waveguides with ALD-grown thin films

L. Karvonen, A. Säynätjoki, X. Tu, T.Y. Liow, Marianne Hiltunen, Jussi Hiltunen, A. Tervonen, G.Q. Lo, S. Honkanen

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

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Physics & Astronomy