Low operation voltage non self-emissive MEMS color filter pixels

Chengyao Lo; Jukka Hast; Olli-Heikki Huttunen; Jarno Petäjä; Johanna Hiitola-Keinänen; Arto Maaninen; Harri Kopola; H. Fujita; H. Toshiyoshi

doi:10.1109/OMEMS.2008.4607856

Low operation voltage non self-emissive MEMS color filter pixels

Chengyao Lo, Jukka Hast, Olli-Heikki Huttunen, Jarno Petäjä, Johanna Hiitola-Keinänen, Arto Maaninen, Harri Kopola, H. Fujita, H. Toshiyoshi

VTT Technical Research Centre of Finland

University of Tokyo

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

3 Citations (Scopus)

Abstract

A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.

Original language	English
Title of host publication	2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008
Publisher	IEEE Institute of Electrical and Electronic Engineers
Pages	116-117
ISBN (Electronic)	978-1-4244-1918-0
ISBN (Print)	978-1-4244-1917-3
DOIs	https://doi.org/10.1109/OMEMS.2008.4607856
Publication status	Published - 2008
MoE publication type	A4 Article in a conference publication

Keywords

Air groove
Color filter
Fabry-Perot
MEMS (micro electro mechanical system)
Seesaw effect

Access to Document

10.1109/OMEMS.2008.4607856

Cite this

Lo, C., Hast, J., Huttunen, O.-H., Petäjä, J., Hiitola-Keinänen, J., Maaninen, A., Kopola, H., Fujita, H., & Toshiyoshi, H. (2008). Low operation voltage non self-emissive MEMS color filter pixels. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008 (pp. 116-117). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/OMEMS.2008.4607856

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title = "Low operation voltage non self-emissive MEMS color filter pixels",

abstract = "A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.",

keywords = "Air groove, Color filter, Fabry-Perot, MEMS (micro electro mechanical system), Seesaw effect",

author = "Chengyao Lo and Jukka Hast and Olli-Heikki Huttunen and Jarno Pet{\"a}j{\"a} and Johanna Hiitola-Kein{\"a}nen and Arto Maaninen and Harri Kopola and H. Fujita and H. Toshiyoshi",

year = "2008",

doi = "10.1109/OMEMS.2008.4607856",

language = "English",

isbn = "978-1-4244-1917-3 ",

pages = "116--117",

booktitle = "2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008",

publisher = "IEEE Institute of Electrical and Electronic Engineers",

address = "United States",

}

Lo, C, Hast, J , Huttunen, O-H , Petäjä, J , Hiitola-Keinänen, J, Maaninen, A, Kopola, H, Fujita, H & Toshiyoshi, H 2008, Low operation voltage non self-emissive MEMS color filter pixels. in 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008. IEEE Institute of Electrical and Electronic Engineers, pp. 116-117. https://doi.org/10.1109/OMEMS.2008.4607856

Low operation voltage non self-emissive MEMS color filter pixels. / Lo, Chengyao; Hast, Jukka ; Huttunen, Olli-Heikki et al.
2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008. IEEE Institute of Electrical and Electronic Engineers, 2008. p. 116-117.

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

TY - GEN

T1 - Low operation voltage non self-emissive MEMS color filter pixels

AU - Lo, Chengyao

AU - Hast, Jukka

AU - Huttunen, Olli-Heikki

AU - Petäjä, Jarno

AU - Hiitola-Keinänen, Johanna

AU - Maaninen, Arto

AU - Kopola, Harri

AU - Fujita, H.

AU - Toshiyoshi, H.

PY - 2008

Y1 - 2008

N2 - A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.

AB - A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.

KW - Air groove

KW - Color filter

KW - Fabry-Perot

KW - MEMS (micro electro mechanical system)

KW - Seesaw effect

U2 - 10.1109/OMEMS.2008.4607856

DO - 10.1109/OMEMS.2008.4607856

M3 - Conference article in proceedings

SN - 978-1-4244-1917-3

SP - 116

EP - 117

BT - 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008

PB - IEEE Institute of Electrical and Electronic Engineers

ER -

Lo C, Hast J , Huttunen OH , Petäjä J , Hiitola-Keinänen J, Maaninen A et al. Low operation voltage non self-emissive MEMS color filter pixels. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008. IEEE Institute of Electrical and Electronic Engineers. 2008. p. 116-117 doi: 10.1109/OMEMS.2008.4607856

Low operation voltage non self-emissive MEMS color filter pixels

Abstract

Keywords

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