Low operation voltage non self-emissive MEMS color filter pixels

Chengyao Lo, Jukka Hast, Olli-Heikki Huttunen, Jarno Petäjä, Johanna Hiitola-Keinänen, Arto Maaninen, Harri Kopola, H. Fujita, H. Toshiyoshi

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

2 Citations (Scopus)

Abstract

A 50% reduction of operation voltage improvement was achieved on a non self-emissive color filter pixels based on MEMS (micro electro mechanical system) Fabry-Perot interference device by minimizing its Newton's rings' size. Newly designed air grooves in spacer layer were proved to be efficient to evacuate air trapped inside pixels which in turn effectively lowered its operation voltage. A seesaw effect was also found if air groove occupied too large area which degrades the operation voltage lowering benefit.
Original languageEnglish
Title of host publication2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008
PublisherIEEE Institute of Electrical and Electronic Engineers
Pages116-117
ISBN (Electronic)978-1-4244-1918-0
ISBN (Print)978-1-4244-1917-3
DOIs
Publication statusPublished - 2008
MoE publication typeA4 Article in a conference publication

Keywords

  • Air groove
  • Color filter
  • Fabry-Perot
  • MEMS (micro electro mechanical system)
  • Seesaw effect

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    Lo, C., Hast, J., Huttunen, O-H., Petäjä, J., Hiitola-Keinänen, J., Maaninen, A., Kopola, H., Fujita, H., & Toshiyoshi, H. (2008). Low operation voltage non self-emissive MEMS color filter pixels. In 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS. Freiburg, Germany, 11 - 14 Aug. 2008 (pp. 116-117). IEEE Institute of Electrical and Electronic Engineers. https://doi.org/10.1109/OMEMS.2008.4607856