Low-temperature molecular layer deposition using monifunctional aromatic precursors and ozone-based ring-opening reactions

Laura Svärd, Matti Putkonen, Eija Kenttä, Timo Sajavaara, Fabian Krahl, Maarit Karppinen, Kevin Van de Kerckhove, Christophe Detavernier, Pekka Simell

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