Low-Temperature Processes for MEMS Device Fabrication

Jyrki Kiihamäki (Corresponding author), Hannu Kattelus, Martti Blomberg, Riikka Puurunen, Mari Laamanen, Panu Pekko, Jaakko Saarilahti, Heini Ritala, Anna Rissanen

    Research output: Chapter in Book/Report/Conference proceedingChapter or book articleScientificpeer-review

    6 Citations (Scopus)

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    Physics & Astronomy