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Low-Temperature Processes for MEMS Device Fabrication
Jyrki Kiihamäki (Corresponding author), Hannu Kattelus, Martti Blomberg, Riikka Puurunen, Mari Laamanen, Panu Pekko, Jaakko Saarilahti, Heini Ritala, Anna Rissanen
Research output: Chapter in Book/Report/Conference proceeding › Chapter or book article › Scientific › peer-review
6
Citations
(Scopus)