LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja; Kimmo Keränen; Kari Kautio; Jyrki Ollila; Mikko Heikkinen; I. Kauppinen; T. Kuusela; B. Matveev; M. E. McNie; R. M. Jenkins; Juha Palve

doi:10.1117/12.851854

LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja, Kimmo Keränen, Kari Kautio, Jyrki Ollila, Mikko Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. E. McNie, R. M. Jenkins, Juha Palve

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	Optical Sensing and Detection
DOIs	https://doi.org/10.1117/12.851854
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	SPIE Photonics Europe 2010: Optical Sensing and Detection - Brussels, Belgium Duration: 12 Apr 2010 → 15 Apr 2010

Publication series

Series	Proceedings of SPIE
Volume	7726

Conference

Conference	SPIE Photonics Europe 2010
Country/Territory	Belgium
City	Brussels
Period	12/04/10 → 15/04/10

Keywords

differential Infra-Red detector
Differential LTCC gas cell
hermetic sealing
interferometric probing
IR-LEDs
photo acoustic sensing
ppm gas sensing
silicon cantilever

Access to Document

10.1117/12.851854

Cite this

@inproceedings{0c6f04e31b834eb6a8568dfe63f7e295,

title = "LTCC-based differential photo acoustic cell for ppm gas sensing",

keywords = "differential Infra-Red detector, Differential LTCC gas cell, hermetic sealing, interferometric probing, IR-LEDs, photo acoustic sensing, ppm gas sensing, silicon cantilever",

author = "Pentti Karioja and Kimmo Ker{\"a}nen and Kari Kautio and Jyrki Ollila and Mikko Heikkinen and I. Kauppinen and T. Kuusela and B. Matveev and McNie, {M. E.} and Jenkins, {R. M.} and Juha Palve",

year = "2010",

doi = "10.1117/12.851854",

language = "English",

isbn = "978081948199-3",

series = "Proceedings of SPIE",

publisher = "International Society for Optics and Photonics SPIE",

booktitle = "Optical Sensing and Detection",

note = "SPIE Photonics Europe 2010 : Optical Sensing and Detection ; Conference date: 12-04-2010 Through 15-04-2010",

}

TY - GEN

T1 - LTCC-based differential photo acoustic cell for ppm gas sensing

AU - Karioja, Pentti

AU - Keränen, Kimmo

AU - Kautio, Kari

AU - Ollila, Jyrki

AU - Heikkinen, Mikko

AU - Kauppinen, I.

AU - Kuusela, T.

AU - Matveev, B.

AU - McNie, M. E.

AU - Jenkins, R. M.

AU - Palve, Juha

PY - 2010

Y1 - 2010

KW - differential Infra-Red detector

KW - Differential LTCC gas cell

KW - hermetic sealing

KW - interferometric probing

KW - IR-LEDs

KW - photo acoustic sensing

KW - ppm gas sensing

KW - silicon cantilever

U2 - 10.1117/12.851854

DO - 10.1117/12.851854

M3 - Conference article in proceedings

SN - 978081948199-3

T3 - Proceedings of SPIE

BT - Optical Sensing and Detection

T2 - SPIE Photonics Europe 2010

Y2 - 12 April 2010 through 15 April 2010

ER -