LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja, Kimmo Keränen, Kari Kautio, Jyrki Ollila, Mikko Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. E. McNie, R. M. Jenkins, Juha Palve

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Title of host publicationOptical Sensing and Detection
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe 2010: Optical Sensing and Detection - Brussels, Belgium
Duration: 12 Apr 201015 Apr 2010

Publication series

SeriesProceedings of SPIE
Volume7726

Conference

ConferenceSPIE Photonics Europe 2010
CountryBelgium
CityBrussels
Period12/04/1015/04/10

Keywords

  • differential Infra-Red detector
  • Differential LTCC gas cell
  • hermetic sealing
  • interferometric probing
  • IR-LEDs
  • photo acoustic sensing
  • ppm gas sensing
  • silicon cantilever

Cite this

Karioja, P., Keränen, K., Kautio, K., Ollila, J., Heikkinen, M., Kauppinen, I., Kuusela, T., Matveev, B., McNie, M. E., Jenkins, R. M., & Palve, J. (2010). LTCC-based differential photo acoustic cell for ppm gas sensing. In Optical Sensing and Detection Proceedings of SPIE, Vol.. 7726 https://doi.org/10.1117/12.851854