LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja, Kimmo Keränen, Kari Kautio, Jyrki Ollila, Mikko Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. E. McNie, R. M. Jenkins, Juha Palve

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

6 Citations (Scopus)
Original languageEnglish
Title of host publicationOptical Sensing and Detection
DOIs
Publication statusPublished - 2010
MoE publication typeA4 Article in a conference publication
EventSPIE Photonics Europe 2010: Optical Sensing and Detection - Brussels, Belgium
Duration: 12 Apr 201015 Apr 2010

Publication series

SeriesProceedings of SPIE
Volume7726

Conference

ConferenceSPIE Photonics Europe 2010
CountryBelgium
CityBrussels
Period12/04/1015/04/10

Keywords

  • differential Infra-Red detector
  • Differential LTCC gas cell
  • hermetic sealing
  • interferometric probing
  • IR-LEDs
  • photo acoustic sensing
  • ppm gas sensing
  • silicon cantilever

Cite this

Karioja, P., Keränen, K., Kautio, K., Ollila, J., Heikkinen, M., Kauppinen, I., ... Palve, J. (2010). LTCC-based differential photo acoustic cell for ppm gas sensing. In Optical Sensing and Detection Proceedings of SPIE, Vol.. 7726 https://doi.org/10.1117/12.851854
Karioja, Pentti ; Keränen, Kimmo ; Kautio, Kari ; Ollila, Jyrki ; Heikkinen, Mikko ; Kauppinen, I. ; Kuusela, T. ; Matveev, B. ; McNie, M. E. ; Jenkins, R. M. ; Palve, Juha. / LTCC-based differential photo acoustic cell for ppm gas sensing. Optical Sensing and Detection. 2010. (Proceedings of SPIE, Vol. 7726).
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title = "LTCC-based differential photo acoustic cell for ppm gas sensing",
keywords = "differential Infra-Red detector, Differential LTCC gas cell, hermetic sealing, interferometric probing, IR-LEDs, photo acoustic sensing, ppm gas sensing, silicon cantilever",
author = "Pentti Karioja and Kimmo Ker{\"a}nen and Kari Kautio and Jyrki Ollila and Mikko Heikkinen and I. Kauppinen and T. Kuusela and B. Matveev and McNie, {M. E.} and Jenkins, {R. M.} and Juha Palve",
year = "2010",
doi = "10.1117/12.851854",
language = "English",
isbn = "978081948199-3",
series = "Proceedings of SPIE",
publisher = "International Society for Optics and Photonics SPIE",
booktitle = "Optical Sensing and Detection",

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Karioja, P, Keränen, K, Kautio, K, Ollila, J, Heikkinen, M, Kauppinen, I, Kuusela, T, Matveev, B, McNie, ME, Jenkins, RM & Palve, J 2010, LTCC-based differential photo acoustic cell for ppm gas sensing. in Optical Sensing and Detection. Proceedings of SPIE, vol. 7726, SPIE Photonics Europe 2010, Brussels, Belgium, 12/04/10. https://doi.org/10.1117/12.851854

LTCC-based differential photo acoustic cell for ppm gas sensing. / Karioja, Pentti; Keränen, Kimmo; Kautio, Kari; Ollila, Jyrki; Heikkinen, Mikko; Kauppinen, I.; Kuusela, T.; Matveev, B.; McNie, M. E.; Jenkins, R. M.; Palve, Juha.

Optical Sensing and Detection. 2010. (Proceedings of SPIE, Vol. 7726).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

TY - GEN

T1 - LTCC-based differential photo acoustic cell for ppm gas sensing

AU - Karioja, Pentti

AU - Keränen, Kimmo

AU - Kautio, Kari

AU - Ollila, Jyrki

AU - Heikkinen, Mikko

AU - Kauppinen, I.

AU - Kuusela, T.

AU - Matveev, B.

AU - McNie, M. E.

AU - Jenkins, R. M.

AU - Palve, Juha

PY - 2010

Y1 - 2010

KW - differential Infra-Red detector

KW - Differential LTCC gas cell

KW - hermetic sealing

KW - interferometric probing

KW - IR-LEDs

KW - photo acoustic sensing

KW - ppm gas sensing

KW - silicon cantilever

U2 - 10.1117/12.851854

DO - 10.1117/12.851854

M3 - Conference article in proceedings

SN - 978081948199-3

T3 - Proceedings of SPIE

BT - Optical Sensing and Detection

ER -

Karioja P, Keränen K, Kautio K, Ollila J, Heikkinen M, Kauppinen I et al. LTCC-based differential photo acoustic cell for ppm gas sensing. In Optical Sensing and Detection. 2010. (Proceedings of SPIE, Vol. 7726). https://doi.org/10.1117/12.851854