LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja, Kimmo Keränen, Kari Kautio, Jyrki Ollila, Mikko Heikkinen, I. Kauppinen, T. Kuusela, B. Matveev, M. E. McNie, R. M. Jenkins, Juha Palve

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientificpeer-review

    7 Citations (Scopus)
    Original languageEnglish
    Title of host publicationOptical Sensing and Detection
    DOIs
    Publication statusPublished - 2010
    MoE publication typeA4 Article in a conference publication
    EventSPIE Photonics Europe 2010: Optical Sensing and Detection - Brussels, Belgium
    Duration: 12 Apr 201015 Apr 2010

    Publication series

    SeriesProceedings of SPIE
    Volume7726

    Conference

    ConferenceSPIE Photonics Europe 2010
    Country/TerritoryBelgium
    CityBrussels
    Period12/04/1015/04/10

    Keywords

    • differential Infra-Red detector
    • Differential LTCC gas cell
    • hermetic sealing
    • interferometric probing
    • IR-LEDs
    • photo acoustic sensing
    • ppm gas sensing
    • silicon cantilever

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