LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja; Kimmo Keränen; Kari Kautio; Jyrki Ollila; Mikko Heikkinen; I. Kauppinen; T. Kuusela; B. Matveev; M. E. McNie; R. M. Jenkins; Juha Palve

doi:10.1117/12.851854

LTCC-based differential photo acoustic cell for ppm gas sensing

Pentti Karioja
, Kimmo Keränen
, Kari Kautio
, Jyrki Ollila
, Mikko Heikkinen
, I. Kauppinen
, T. Kuusela
, B. Matveev
, M. E. McNie
, R. M. Jenkins
, Juha Palve

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific › peer-review

9 Citations (Scopus)

Original language	English
Title of host publication	Optical Sensing and Detection
DOIs	https://doi.org/10.1117/12.851854
Publication status	Published - 2010
MoE publication type	A4 Article in a conference publication
Event	SPIE Photonics Europe 2010: Optical Sensing and Detection - Brussels, Belgium Duration: 12 Apr 2010 → 15 Apr 2010

Publication series

Series	Proceedings of SPIE
Volume	7726

Conference

Conference	SPIE Photonics Europe 2010
Country/Territory	Belgium
City	Brussels
Period	12/04/10 → 15/04/10

Keywords

differential Infra-Red detector
Differential LTCC gas cell
hermetic sealing
interferometric probing
IR-LEDs
photo acoustic sensing
ppm gas sensing
silicon cantilever

Access to Document

10.1117/12.851854

Cite this

@inproceedings{0c6f04e31b834eb6a8568dfe63f7e295,

title = "LTCC-based differential photo acoustic cell for ppm gas sensing",

keywords = "differential Infra-Red detector, Differential LTCC gas cell, hermetic sealing, interferometric probing, IR-LEDs, photo acoustic sensing, ppm gas sensing, silicon cantilever",

author = "Pentti Karioja and Kimmo Ker{\"a}nen and Kari Kautio and Jyrki Ollila and Mikko Heikkinen and I. Kauppinen and T. Kuusela and B. Matveev and McNie, \{M. E.\} and Jenkins, \{R. M.\} and Juha Palve",

year = "2010",

doi = "10.1117/12.851854",

language = "English",

isbn = "978081948199-3",

series = "Proceedings of SPIE",

publisher = "International society for productivity enhancement (ISPE)",

booktitle = "Optical Sensing and Detection",

note = "SPIE Photonics Europe 2010 : Optical Sensing and Detection ; Conference date: 12-04-2010 Through 15-04-2010",

}

TY - GEN

T1 - LTCC-based differential photo acoustic cell for ppm gas sensing

AU - Karioja, Pentti

AU - Keränen, Kimmo

AU - Kautio, Kari

AU - Ollila, Jyrki

AU - Heikkinen, Mikko

AU - Kauppinen, I.

AU - Kuusela, T.

AU - Matveev, B.

AU - McNie, M. E.

AU - Jenkins, R. M.

AU - Palve, Juha

PY - 2010

Y1 - 2010

KW - differential Infra-Red detector

KW - Differential LTCC gas cell

KW - hermetic sealing

KW - interferometric probing

KW - IR-LEDs

KW - photo acoustic sensing

KW - ppm gas sensing

KW - silicon cantilever

U2 - 10.1117/12.851854

DO - 10.1117/12.851854

M3 - Conference article in proceedings

SN - 978081948199-3

T3 - Proceedings of SPIE

BT - Optical Sensing and Detection

T2 - SPIE Photonics Europe 2010

Y2 - 12 April 2010 through 15 April 2010

ER -