LTCC substrate technology for MEMS applications

Jaakko Lenkkeri, Tuomo Jaakola, Kari Kautio

    Research output: Contribution to conferenceConference articleScientificpeer-review

    Original languageEnglish
    Publication statusPublished - 2002
    MoE publication typeNot Eligible
    EventInternational Workshop on Power MEMS - Tsukuba, Japan
    Duration: 12 Nov 200213 Nov 2002

    Workshop

    WorkshopInternational Workshop on Power MEMS
    CountryJapan
    CityTsukuba
    Period12/11/0213/11/02

    Cite this

    Lenkkeri, J., Jaakola, T., & Kautio, K. (2002). LTCC substrate technology for MEMS applications. Paper presented at International Workshop on Power MEMS, Tsukuba, Japan.