LTCC substrate technology for MEMS applications

Jaakko Lenkkeri; Tuomo Jaakola; Kari Kautio

LTCC substrate technology for MEMS applications

Jaakko Lenkkeri
, Tuomo Jaakola
, Kari Kautio

Research output: Contribution to conference › Conference article › Scientific › peer-review

Original language	English
Publication status	Published - 2002
MoE publication type	Not Eligible
Event	International Workshop on Power MEMS - Tsukuba, Japan Duration: 12 Nov 2002 → 13 Nov 2002

Workshop

Workshop	International Workshop on Power MEMS
Country/Territory	Japan
City	Tsukuba
Period	12/11/02 → 13/11/02

Cite this

@conference{6334ce7e27274c4e836cd8b2adedf735,

title = "LTCC substrate technology for MEMS applications",

author = "Jaakko Lenkkeri and Tuomo Jaakola and Kari Kautio",

note = "No bibliographic info about proceedings publication found; International Workshop on Power MEMS ; Conference date: 12-11-2002 Through 13-11-2002",

year = "2002",

language = "English",

}