Management of static electricity and ESD in cleanroom production of electronics

Research output: Chapter in Book/Report/Conference proceeding › Conference article in proceedings › Scientific

Original language	English
Title of host publication	34th R3-Nordic Contamination Control Symposium
Place of Publication	Espoo
Publisher	VTT Technical Research Centre of Finland
Pages	349-374
ISBN (Electronic)	951-38-6285-2
ISBN (Print)	951-38-6284-4
Publication status	Published - 2003
MoE publication type	B3 Non-refereed article in conference proceedings
Event	34th R3-Nordic Contamination Control Symposium - Turku, Finland Duration: 2 Jun 2003 → 4 Jun 2003

Conference	34th R3-Nordic Contamination Control Symposium
Country/Territory	Finland
City	Turku
Period	2/06/03 → 4/06/03

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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title = "Management of static electricity and ESD in cleanroom production of electronics",

author = "Jaakko Paasi",

year = "2003",

language = "English",

isbn = "951-38-6284-4",

series = "VTT Symposium",

publisher = "VTT Technical Research Centre of Finland",

number = "229",

pages = "349--374",

booktitle = "34th R3-Nordic Contamination Control Symposium",

address = "Finland",

note = "34th R3-Nordic Contamination Control Symposium ; Conference date: 02-06-2003 Through 04-06-2003",

}

TY - GEN

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AU - Paasi, Jaakko

PY - 2003

Y1 - 2003

M3 - Conference article in proceedings

SN - 951-38-6284-4

T3 - VTT Symposium

SP - 349

EP - 374

BT - 34th R3-Nordic Contamination Control Symposium

PB - VTT Technical Research Centre of Finland

CY - Espoo

T2 - 34th R3-Nordic Contamination Control Symposium

Y2 - 2 June 2003 through 4 June 2003

ER -