Management of static electricity and ESD in cleanroom production of electronics

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publication34th R3-Nordic Contamination Control Symposium
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages349-374
    ISBN (Electronic)951-38-6285-2
    ISBN (Print)951-38-6284-4
    Publication statusPublished - 2003
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
    Duration: 2 Jun 20034 Jun 2003

    Publication series

    SeriesVTT Symposium
    Number229
    ISSN0357-9387

    Conference

    Conference34th R3-Nordic Contamination Control Symposium
    CountryFinland
    CityTurku
    Period2/06/034/06/03

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