Management of static electricity and ESD in cleanroom production of electronics

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

1 Citation (Scopus)
Original languageEnglish
Title of host publication34th R3-Nordic Contamination Control Symposium
Place of PublicationEspoo
PublisherVTT Technical Research Centre of Finland
Pages349-374
ISBN (Electronic)951-38-6285-2
ISBN (Print)951-38-6284-4
Publication statusPublished - 2003
MoE publication typeB3 Non-refereed article in conference proceedings
Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
Duration: 2 Jun 20034 Jun 2003

Publication series

SeriesVTT Symposium
Number229
ISSN0357-9387

Conference

Conference34th R3-Nordic Contamination Control Symposium
CountryFinland
CityTurku
Period2/06/034/06/03

Cite this

Paasi, J. (2003). Management of static electricity and ESD in cleanroom production of electronics. In 34th R3-Nordic Contamination Control Symposium (pp. 349-374). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 229
Paasi, Jaakko. / Management of static electricity and ESD in cleanroom production of electronics. 34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. pp. 349-374 (VTT Symposium; No. 229).
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Paasi, J 2003, Management of static electricity and ESD in cleanroom production of electronics. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 349-374, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03.

Management of static electricity and ESD in cleanroom production of electronics. / Paasi, Jaakko.

34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. p. 349-374 (VTT Symposium; No. 229).

Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

TY - GEN

T1 - Management of static electricity and ESD in cleanroom production of electronics

AU - Paasi, Jaakko

PY - 2003

Y1 - 2003

M3 - Conference article in proceedings

SN - 951-38-6284-4

T3 - VTT Symposium

SP - 349

EP - 374

BT - 34th R3-Nordic Contamination Control Symposium

PB - VTT Technical Research Centre of Finland

CY - Espoo

ER -

Paasi J. Management of static electricity and ESD in cleanroom production of electronics. In 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland. 2003. p. 349-374. (VTT Symposium; No. 229).