Management of static electricity and ESD in cleanroom production of electronics

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    1 Citation (Scopus)
    Original languageEnglish
    Title of host publication34th R3-Nordic Contamination Control Symposium
    Place of PublicationEspoo
    PublisherVTT Technical Research Centre of Finland
    Pages349-374
    ISBN (Electronic)951-38-6285-2
    ISBN (Print)951-38-6284-4
    Publication statusPublished - 2003
    MoE publication typeB3 Non-refereed article in conference proceedings
    Event34th R3-Nordic Contamination Control Symposium - Turku, Finland
    Duration: 2 Jun 20034 Jun 2003

    Publication series

    SeriesVTT Symposium
    Number229
    ISSN0357-9387

    Conference

    Conference34th R3-Nordic Contamination Control Symposium
    CountryFinland
    CityTurku
    Period2/06/034/06/03

    Cite this

    Paasi, J. (2003). Management of static electricity and ESD in cleanroom production of electronics. In 34th R3-Nordic Contamination Control Symposium (pp. 349-374). Espoo: VTT Technical Research Centre of Finland. VTT Symposium, No. 229
    Paasi, Jaakko. / Management of static electricity and ESD in cleanroom production of electronics. 34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. pp. 349-374 (VTT Symposium; No. 229).
    @inproceedings{de675d1377b5486bbc0e41e437ff1b94,
    title = "Management of static electricity and ESD in cleanroom production of electronics",
    author = "Jaakko Paasi",
    year = "2003",
    language = "English",
    isbn = "951-38-6284-4",
    series = "VTT Symposium",
    publisher = "VTT Technical Research Centre of Finland",
    number = "229",
    pages = "349--374",
    booktitle = "34th R3-Nordic Contamination Control Symposium",
    address = "Finland",

    }

    Paasi, J 2003, Management of static electricity and ESD in cleanroom production of electronics. in 34th R3-Nordic Contamination Control Symposium. VTT Technical Research Centre of Finland, Espoo, VTT Symposium, no. 229, pp. 349-374, 34th R3-Nordic Contamination Control Symposium, Turku, Finland, 2/06/03.

    Management of static electricity and ESD in cleanroom production of electronics. / Paasi, Jaakko.

    34th R3-Nordic Contamination Control Symposium. Espoo : VTT Technical Research Centre of Finland, 2003. p. 349-374 (VTT Symposium; No. 229).

    Research output: Chapter in Book/Report/Conference proceedingConference article in proceedingsScientific

    TY - GEN

    T1 - Management of static electricity and ESD in cleanroom production of electronics

    AU - Paasi, Jaakko

    PY - 2003

    Y1 - 2003

    M3 - Conference article in proceedings

    SN - 951-38-6284-4

    T3 - VTT Symposium

    SP - 349

    EP - 374

    BT - 34th R3-Nordic Contamination Control Symposium

    PB - VTT Technical Research Centre of Finland

    CY - Espoo

    ER -

    Paasi J. Management of static electricity and ESD in cleanroom production of electronics. In 34th R3-Nordic Contamination Control Symposium. Espoo: VTT Technical Research Centre of Finland. 2003. p. 349-374. (VTT Symposium; No. 229).